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- W2626297348 abstract "In this study, we fabricated an in-plane thermoelectric micro-generator using free-standing film prepared by standard micro-fabrication processes. We fabricated a SiNx free-standing film substrate about 5 μm thick on Si wafer, and both p and n type of bismuth telluride thermoelectric thin films by using a coaxial type vacuum arc evaporation method. The thermoelectric films were annealed for one hour at 573 K to improve the film properties. A shadow mask was used for the patterning of the generator. Temperature difference of 22.3 K was measured in the generator due to its high thermal resistance at 373 K heating. The exergy of the thermoelectric device is up to 7 %. Therefore, the generator converted about 0.4 % of thermal energy into electric energy, even though the material performance is low with ZT = 0.28. The conversion efficiency is much higher than that of the conventional Π type thermoelectric module. It was possible to get higher performance by the thermal design, which is a more simple way than an improvement of ZT." @default.
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- W2626297348 date "2016-01-01" @default.
- W2626297348 modified "2023-09-27" @default.
- W2626297348 title "Development on an in-plane thermoelectric micro-generator" @default.
- W2626297348 doi "https://doi.org/10.1299/jsmeted.2016.h122" @default.
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