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- W2626341750 abstract "This article outlines theoretical and experimental results for polarized light scattering from five different sample configurations: surface roughness of a single interface, defects below a single interface, spherical particles above a single surface, spherical particles above a dielectric film, and roughness of the top interface of a dielectric film. These measurements demonstrate that polarized light scattering can be used to characterized defects on surfaces, provided sufficient information is available about the system without defects. It is found that measurement of the principal direction of the polarization for p-polarized incident light, η, when measured out of the plane of incidence, can be used to distinguish amongst light scattered by microroughness, subsurface defects, and particulate contaminants." @default.
- W2626341750 created "2017-06-23" @default.
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- W2626341750 date "1999-07-01" @default.
- W2626341750 modified "2023-09-23" @default.
- W2626341750 title "Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silcon Wafers" @default.
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