Matches in SemOpenAlex for { <https://semopenalex.org/work/W2626706989> ?p ?o ?g. }
- W2626706989 endingPage "100" @default.
- W2626706989 startingPage "96" @default.
- W2626706989 abstract "In the present work, Ru as well as Cu chemical mechanical planarization (CMP) with slurry containing fumed silica as abrasive and sodium hypochlorite as oxidizer was investigated. Benzotriazole (BTA) was used as a corrosion inhibitor for the proposed slurry. The results reveal that for CMP runs with only sodium hypochlorite, Ru RR was found to be higher at pH 7 and decreases as the pH decreases or increases, while Cu RR decreases with the increase in pH. Addition of BTA to the slurry resulted in a slight decrease in the removal rate. The polishing selectivity between Cu and Ru was found to be ~ 1 at pH 9, which is desired for the microelectronic industries. RuO4 is formed in the acidic pH whereas RuO4− and RuO42 − were formed between pH 7 and 14 in the presence of sodium hypochlorite. RuO4/RuO4− species assist in forming RuO3/RuO2 which is porous in nature and maintains the removal rate. Polishing selectivity obtained using the proposed slurry was found to be less sensitive to any changes in pressure and table speed." @default.
- W2626706989 created "2017-06-23" @default.
- W2626706989 creator A5036847263 @default.
- W2626706989 creator A5054360276 @default.
- W2626706989 creator A5082069658 @default.
- W2626706989 creator A5084590335 @default.
- W2626706989 date "2017-08-01" @default.
- W2626706989 modified "2023-09-24" @default.
- W2626706989 title "Sodium hypochlorite as an oxidizing agent in silica based ruthenium chemical mechanical planarization slurry" @default.
- W2626706989 cites W1771987095 @default.
- W2626706989 cites W1964592862 @default.
- W2626706989 cites W1973064562 @default.
- W2626706989 cites W1984200665 @default.
- W2626706989 cites W1992370612 @default.
- W2626706989 cites W2000338825 @default.
- W2626706989 cites W2012696034 @default.
- W2626706989 cites W2020462389 @default.
- W2626706989 cites W2023980589 @default.
- W2626706989 cites W2029304723 @default.
- W2626706989 cites W2037799780 @default.
- W2626706989 cites W2037887304 @default.
- W2626706989 cites W2051071981 @default.
- W2626706989 cites W2059430086 @default.
- W2626706989 cites W2067319177 @default.
- W2626706989 cites W2076205509 @default.
- W2626706989 cites W2079735466 @default.
- W2626706989 cites W2095962657 @default.
- W2626706989 cites W2108644194 @default.
- W2626706989 cites W2108940869 @default.
- W2626706989 cites W2138869557 @default.
- W2626706989 cites W2146796505 @default.
- W2626706989 cites W2149911322 @default.
- W2626706989 cites W2154061477 @default.
- W2626706989 cites W2169705925 @default.
- W2626706989 cites W2194681652 @default.
- W2626706989 cites W2326716534 @default.
- W2626706989 cites W2332122612 @default.
- W2626706989 cites W780622624 @default.
- W2626706989 cites W2466343345 @default.
- W2626706989 doi "https://doi.org/10.1016/j.mee.2017.06.006" @default.
- W2626706989 hasPublicationYear "2017" @default.
- W2626706989 type Work @default.
- W2626706989 sameAs 2626706989 @default.
- W2626706989 citedByCount "13" @default.
- W2626706989 countsByYear W26267069892017 @default.
- W2626706989 countsByYear W26267069892018 @default.
- W2626706989 countsByYear W26267069892019 @default.
- W2626706989 countsByYear W26267069892020 @default.
- W2626706989 countsByYear W26267069892021 @default.
- W2626706989 countsByYear W26267069892022 @default.
- W2626706989 countsByYear W26267069892023 @default.
- W2626706989 crossrefType "journal-article" @default.
- W2626706989 hasAuthorship W2626706989A5036847263 @default.
- W2626706989 hasAuthorship W2626706989A5054360276 @default.
- W2626706989 hasAuthorship W2626706989A5082069658 @default.
- W2626706989 hasAuthorship W2626706989A5084590335 @default.
- W2626706989 hasConcept C118792377 @default.
- W2626706989 hasConcept C127413603 @default.
- W2626706989 hasConcept C148328677 @default.
- W2626706989 hasConcept C159985019 @default.
- W2626706989 hasConcept C161790260 @default.
- W2626706989 hasConcept C178790620 @default.
- W2626706989 hasConcept C179104552 @default.
- W2626706989 hasConcept C180088628 @default.
- W2626706989 hasConcept C185592680 @default.
- W2626706989 hasConcept C192562407 @default.
- W2626706989 hasConcept C2776776456 @default.
- W2626706989 hasConcept C2776832558 @default.
- W2626706989 hasConcept C2777844968 @default.
- W2626706989 hasConcept C2779227376 @default.
- W2626706989 hasConcept C42360764 @default.
- W2626706989 hasConcept C77176794 @default.
- W2626706989 hasConcept C94293008 @default.
- W2626706989 hasConceptScore W2626706989C118792377 @default.
- W2626706989 hasConceptScore W2626706989C127413603 @default.
- W2626706989 hasConceptScore W2626706989C148328677 @default.
- W2626706989 hasConceptScore W2626706989C159985019 @default.
- W2626706989 hasConceptScore W2626706989C161790260 @default.
- W2626706989 hasConceptScore W2626706989C178790620 @default.
- W2626706989 hasConceptScore W2626706989C179104552 @default.
- W2626706989 hasConceptScore W2626706989C180088628 @default.
- W2626706989 hasConceptScore W2626706989C185592680 @default.
- W2626706989 hasConceptScore W2626706989C192562407 @default.
- W2626706989 hasConceptScore W2626706989C2776776456 @default.
- W2626706989 hasConceptScore W2626706989C2776832558 @default.
- W2626706989 hasConceptScore W2626706989C2777844968 @default.
- W2626706989 hasConceptScore W2626706989C2779227376 @default.
- W2626706989 hasConceptScore W2626706989C42360764 @default.
- W2626706989 hasConceptScore W2626706989C77176794 @default.
- W2626706989 hasConceptScore W2626706989C94293008 @default.
- W2626706989 hasFunder F4320320719 @default.
- W2626706989 hasFunder F4320334771 @default.
- W2626706989 hasLocation W26267069891 @default.
- W2626706989 hasOpenAccess W2626706989 @default.
- W2626706989 hasPrimaryLocation W26267069891 @default.
- W2626706989 hasRelatedWork W1987511106 @default.
- W2626706989 hasRelatedWork W1996521949 @default.
- W2626706989 hasRelatedWork W1999320179 @default.