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- W2628685416 abstract "This paper describes novel technique to fabricate nano-scale cross-linked structure of metal thin film using transfer printing. Au thin-film is deposited on a micro-grooved h-PDMS stamp. Stamping the h-PDMS enables the Au film to be transferred onto a micro-grooved surface of SU-8 substrate. The transferred thin-film successfully forms to be cross-linked structure, of which the length and thickness is 10 - 50 um and less than 100 nm, respectively. The wettability and surface roughness of the h-PDMS stamp affect production yield and crack length of the fabricated nano-structure. An increase of surface roughness and contact angle improves its form accuracy and production yield. It is demonstrated the proposed process is utilized for a fabrication of MEMS elements." @default.
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- W2628685416 date "2013-01-01" @default.
- W2628685416 modified "2023-09-25" @default.
- W2628685416 title "21202 Fabrication of nano-mechanical structure using transfer printing" @default.
- W2628685416 doi "https://doi.org/10.1299/jsmekanto.2013.19.537" @default.
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