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- W2635236197 abstract "Diamond-like carbon (DLC) films are prepared by high power pulsed magnetron sputtering (HPPMS) combined with bipolar type plasma based ion implantation (PBII). The microstructure, electrical and mechanical properties of the films are examined as a function of positive pulse power (Pp) by Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), four-point probe resistivity measurements and nanoindenter tests. In addition, the effect of the pulse sequence is also examined. For comparison, some samples are annealed in vacuum in the range of 200 to 400 °C. The results of resistivity measurements clearly show that electrically conductive DLC films are formed by applying bipolar pulse voltages, and the resistivity decreases with increasing Pp. The temperature is at most estimated to be 200 °C using vacuum thermo-labels. The Raman and XPS analysis reveal that sp2 clusters increase as Pp increases. However, the hardness of the conductive DLC films is kept approximately 12 GPa. The comparison of pulse sequence suggests that the microstructure and properties of the films are affected by ion bombardment effects. In the case of annealed samples, sp2 clusters are also increased with increasing temperature. However, the annealed films are still electrically insulating and the hardness is slightly decreased with increasing temperature. From these results, it is concluded that the bipolar pulse voltage application is effective for the formation of conductive DLC films at relatively low temperature in the HPPMS-PBII system." @default.
- W2635236197 created "2017-06-30" @default.
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- W2635236197 date "2017-08-01" @default.
- W2635236197 modified "2023-10-17" @default.
- W2635236197 title "Conductive diamond-like carbon films prepared by high power pulsed magnetron sputtering with bipolar type plasma based ion implantation system" @default.
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- W2635236197 doi "https://doi.org/10.1016/j.diamond.2017.06.011" @default.
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