Matches in SemOpenAlex for { <https://semopenalex.org/work/W263670108> ?p ?o ?g. }
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97
with 100 items per page.
- W263670108 endingPage "377" @default.
- W263670108 startingPage "373" @default.
- W263670108 abstract "The interfacial state density existing in metal-insulator-semiconductor (MIS) structures was measured by deep level transient spectroscopy technique. The MIS structures were fabricated on InP substrates by direct deposition of silicon nitride SiN x H) thin films by the electron cyclotron resonance method. In this work, we show that interfacial state density can be diminished without degrading electrical insulator properties by fabricating MIS structures based on a bi-layered insulator with different insulator compositions and different thickness. The effect of rapid thermal annealing treatment has been analysed in detail in these samples. An interface state density as low as 3 × 1011cm−2eV−1 was measured in some structures." @default.
- W263670108 created "2016-06-24" @default.
- W263670108 creator A5000559048 @default.
- W263670108 creator A5006835243 @default.
- W263670108 creator A5008334785 @default.
- W263670108 creator A5011198838 @default.
- W263670108 creator A5011786886 @default.
- W263670108 creator A5031236806 @default.
- W263670108 creator A5071788040 @default.
- W263670108 creator A5074842227 @default.
- W263670108 date "1999-01-01" @default.
- W263670108 modified "2023-09-30" @default.
- W263670108 cites W1970857294 @default.
- W263670108 cites W1978857324 @default.
- W263670108 cites W1983840242 @default.
- W263670108 cites W1986158160 @default.
- W263670108 cites W1989815457 @default.
- W263670108 cites W1994839096 @default.
- W263670108 cites W2001570346 @default.
- W263670108 cites W2018561480 @default.
- W263670108 cites W2020850388 @default.
- W263670108 cites W2033756456 @default.
- W263670108 cites W2053321215 @default.
- W263670108 cites W2055686347 @default.
- W263670108 cites W2065885656 @default.
- W263670108 cites W2075349458 @default.
- W263670108 cites W2128922073 @default.
- W263670108 cites W2129003729 @default.
- W263670108 doi "https://doi.org/10.1023/a:1008949507676" @default.
- W263670108 hasPublicationYear "1999" @default.
- W263670108 type Work @default.
- W263670108 sameAs 263670108 @default.
- W263670108 citedByCount "2" @default.
- W263670108 crossrefType "journal-article" @default.
- W263670108 hasAuthorship W263670108A5000559048 @default.
- W263670108 hasAuthorship W263670108A5006835243 @default.
- W263670108 hasAuthorship W263670108A5008334785 @default.
- W263670108 hasAuthorship W263670108A5011198838 @default.
- W263670108 hasAuthorship W263670108A5011786886 @default.
- W263670108 hasAuthorship W263670108A5031236806 @default.
- W263670108 hasAuthorship W263670108A5071788040 @default.
- W263670108 hasAuthorship W263670108A5074842227 @default.
- W263670108 hasBestOaLocation W2636701082 @default.
- W263670108 hasConcept C108225325 @default.
- W263670108 hasConcept C121332964 @default.
- W263670108 hasConcept C153294291 @default.
- W263670108 hasConcept C159985019 @default.
- W263670108 hasConcept C171250308 @default.
- W263670108 hasConcept C19067145 @default.
- W263670108 hasConcept C192562407 @default.
- W263670108 hasConcept C194760766 @default.
- W263670108 hasConcept C204530211 @default.
- W263670108 hasConcept C212702 @default.
- W263670108 hasConcept C2777431650 @default.
- W263670108 hasConcept C2777855556 @default.
- W263670108 hasConcept C2779227376 @default.
- W263670108 hasConcept C49040817 @default.
- W263670108 hasConcept C53143962 @default.
- W263670108 hasConcept C544956773 @default.
- W263670108 hasConceptScore W263670108C108225325 @default.
- W263670108 hasConceptScore W263670108C121332964 @default.
- W263670108 hasConceptScore W263670108C153294291 @default.
- W263670108 hasConceptScore W263670108C159985019 @default.
- W263670108 hasConceptScore W263670108C171250308 @default.
- W263670108 hasConceptScore W263670108C19067145 @default.
- W263670108 hasConceptScore W263670108C192562407 @default.
- W263670108 hasConceptScore W263670108C194760766 @default.
- W263670108 hasConceptScore W263670108C204530211 @default.
- W263670108 hasConceptScore W263670108C212702 @default.
- W263670108 hasConceptScore W263670108C2777431650 @default.
- W263670108 hasConceptScore W263670108C2777855556 @default.
- W263670108 hasConceptScore W263670108C2779227376 @default.
- W263670108 hasConceptScore W263670108C49040817 @default.
- W263670108 hasConceptScore W263670108C53143962 @default.
- W263670108 hasConceptScore W263670108C544956773 @default.
- W263670108 hasIssue "5/6" @default.
- W263670108 hasLocation W2636701081 @default.
- W263670108 hasLocation W2636701082 @default.
- W263670108 hasOpenAccess W263670108 @default.
- W263670108 hasPrimaryLocation W2636701081 @default.
- W263670108 hasRelatedWork W104291876 @default.
- W263670108 hasRelatedWork W194636971 @default.
- W263670108 hasRelatedWork W1982526145 @default.
- W263670108 hasRelatedWork W1994952126 @default.
- W263670108 hasRelatedWork W2001589648 @default.
- W263670108 hasRelatedWork W2047593919 @default.
- W263670108 hasRelatedWork W2167649474 @default.
- W263670108 hasRelatedWork W2787264402 @default.
- W263670108 hasRelatedWork W4225347794 @default.
- W263670108 hasRelatedWork W3086605326 @default.
- W263670108 hasVolume "10" @default.
- W263670108 isParatext "false" @default.
- W263670108 isRetracted "false" @default.
- W263670108 magId "263670108" @default.
- W263670108 workType "article" @default.