Matches in SemOpenAlex for { <https://semopenalex.org/work/W2637996201> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2637996201 endingPage "28_" @default.
- W2637996201 startingPage "_9" @default.
- W2637996201 abstract "We have successfully transferred epitaxial single crystal PZT thin films from MgO substrates onto glass substrates by using micro fabrication process. The internal compressive stress of about 200MPa in the epitaxial PZT thin films was released after the transference. The relative dielectric constant of the PZT thin films increased from 239.4 to 332.9 after the transference with a small decrease of polarization. The crystallinity and crystal orientation of the PZT thin films on the glass substrates were the same to those of epitaxial virgin PZT thin films on the MgO substrates. The transfer process is useful for a fabrication of PZT thin film MEMS devices on any substrates." @default.
- W2637996201 created "2017-06-30" @default.
- W2637996201 creator A5023406808 @default.
- W2637996201 creator A5036954845 @default.
- W2637996201 creator A5061918635 @default.
- W2637996201 creator A5065666549 @default.
- W2637996201 creator A5080334722 @default.
- W2637996201 date "2005-01-01" @default.
- W2637996201 modified "2023-09-26" @default.
- W2637996201 title "914 Transfer method of PZT epitaxial thin films onto glass substrates and evaluation of their dielectric properties" @default.
- W2637996201 doi "https://doi.org/10.1299/jsmekansai.2005.80._9-27_" @default.
- W2637996201 hasPublicationYear "2005" @default.
- W2637996201 type Work @default.
- W2637996201 sameAs 2637996201 @default.
- W2637996201 citedByCount "0" @default.
- W2637996201 crossrefType "journal-article" @default.
- W2637996201 hasAuthorship W2637996201A5023406808 @default.
- W2637996201 hasAuthorship W2637996201A5036954845 @default.
- W2637996201 hasAuthorship W2637996201A5061918635 @default.
- W2637996201 hasAuthorship W2637996201A5065666549 @default.
- W2637996201 hasAuthorship W2637996201A5080334722 @default.
- W2637996201 hasConcept C110738630 @default.
- W2637996201 hasConcept C133386390 @default.
- W2637996201 hasConcept C136525101 @default.
- W2637996201 hasConcept C142724271 @default.
- W2637996201 hasConcept C147789679 @default.
- W2637996201 hasConcept C159985019 @default.
- W2637996201 hasConcept C171250308 @default.
- W2637996201 hasConcept C185592680 @default.
- W2637996201 hasConcept C19067145 @default.
- W2637996201 hasConcept C192562407 @default.
- W2637996201 hasConcept C204787440 @default.
- W2637996201 hasConcept C205049153 @default.
- W2637996201 hasConcept C2779227376 @default.
- W2637996201 hasConcept C46275449 @default.
- W2637996201 hasConcept C49040817 @default.
- W2637996201 hasConcept C71924100 @default.
- W2637996201 hasConceptScore W2637996201C110738630 @default.
- W2637996201 hasConceptScore W2637996201C133386390 @default.
- W2637996201 hasConceptScore W2637996201C136525101 @default.
- W2637996201 hasConceptScore W2637996201C142724271 @default.
- W2637996201 hasConceptScore W2637996201C147789679 @default.
- W2637996201 hasConceptScore W2637996201C159985019 @default.
- W2637996201 hasConceptScore W2637996201C171250308 @default.
- W2637996201 hasConceptScore W2637996201C185592680 @default.
- W2637996201 hasConceptScore W2637996201C19067145 @default.
- W2637996201 hasConceptScore W2637996201C192562407 @default.
- W2637996201 hasConceptScore W2637996201C204787440 @default.
- W2637996201 hasConceptScore W2637996201C205049153 @default.
- W2637996201 hasConceptScore W2637996201C2779227376 @default.
- W2637996201 hasConceptScore W2637996201C46275449 @default.
- W2637996201 hasConceptScore W2637996201C49040817 @default.
- W2637996201 hasConceptScore W2637996201C71924100 @default.
- W2637996201 hasIssue "0" @default.
- W2637996201 hasLocation W26379962011 @default.
- W2637996201 hasOpenAccess W2637996201 @default.
- W2637996201 hasPrimaryLocation W26379962011 @default.
- W2637996201 hasRelatedWork W1491835383 @default.
- W2637996201 hasRelatedWork W1992257316 @default.
- W2637996201 hasRelatedWork W2005366662 @default.
- W2637996201 hasRelatedWork W2021714583 @default.
- W2637996201 hasRelatedWork W2053166513 @default.
- W2637996201 hasRelatedWork W2165969899 @default.
- W2637996201 hasRelatedWork W2347643960 @default.
- W2637996201 hasRelatedWork W2383379936 @default.
- W2637996201 hasRelatedWork W4254418869 @default.
- W2637996201 hasRelatedWork W4280616684 @default.
- W2637996201 hasVolume "2005.80" @default.
- W2637996201 isParatext "false" @default.
- W2637996201 isRetracted "false" @default.
- W2637996201 magId "2637996201" @default.
- W2637996201 workType "article" @default.