FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2646047045> ?p ?o ?g. }

• W2646047045 endingPage "20" @default.
• W2646047045 startingPage "3" @default.
• W2646047045 abstract "This work reports on some key integration aspects for 3D devices fabrication, focusing first on the impact of thermal and plasma treatments at gate module for triple-gate finFETs and their ultimate scaling limit: gate-all-around (GAA) nanowire (NW) FETs, which can be implemented in a lateral (with one or more lateral wires vertically stacked) or vertical configuration. The selected doping schemes and gate metals can also be powerful knobs to engineer the interface properties. In addition, specific steps for lateral NWFETs, such as the wires release process, will be addressed here. Vertical NWFETs, corresponding to the move from a 2D to a 3D CMOS layout, have the potential for lower parasitics, reduced power consumption and for enabling smaller, higher performing SRAM bitcells. We will present here alternative, novel approaches for building and characterizing these devices, focusing on channel-first schemes with improved process control, while tackling critical etch-layout dependences." @default.
• W2646047045 created "2017-06-30" @default.
• W2646047045 creator A5006538977 @default.
• W2646047045 creator A5006635439 @default.
• W2646047045 creator A5007704072 @default.
• W2646047045 creator A5009081483 @default.
• W2646047045 creator A5009512238 @default.
• W2646047045 creator A5009586090 @default.
• W2646047045 creator A5020622600 @default.
• W2646047045 creator A5029989684 @default.
• W2646047045 creator A5030275438 @default.
• W2646047045 creator A5034287544 @default.
• W2646047045 creator A5038024347 @default.
• W2646047045 creator A5044037036 @default.
• W2646047045 creator A5044209857 @default.
• W2646047045 creator A5046125690 @default.
• W2646047045 creator A5046242688 @default.
• W2646047045 creator A5047236007 @default.
• W2646047045 creator A5048366973 @default.
• W2646047045 creator A5049232971 @default.
• W2646047045 creator A5049394620 @default.
• W2646047045 creator A5054123509 @default.
• W2646047045 creator A5062072211 @default.
• W2646047045 creator A5064166800 @default.
• W2646047045 creator A5065848352 @default.
• W2646047045 creator A5069706368 @default.
• W2646047045 creator A5075183384 @default.
• W2646047045 creator A5075862918 @default.
• W2646047045 creator A5078372181 @default.
• W2646047045 creator A5079435576 @default.
• W2646047045 creator A5081272792 @default.
• W2646047045 date "2017-08-15" @default.
• W2646047045 modified "2023-10-01" @default.
• W2646047045 title "(Invited) Challenges on Surface Conditioning in 3D Device Architectures: Triple-Gate FinFETs, Gate-All-Around Lateral and Vertical Nanowire FETs" @default.
• W2646047045 doi "https://doi.org/10.1149/08002.0003ecst" @default.
• W2646047045 hasPublicationYear "2017" @default.
• W2646047045 type Work @default.
• W2646047045 sameAs 2646047045 @default.
• W2646047045 citedByCount "5" @default.
• W2646047045 countsByYear W26460470452018 @default.
• W2646047045 countsByYear W26460470452019 @default.
• W2646047045 countsByYear W26460470452020 @default.
• W2646047045 countsByYear W26460470452021 @default.
• W2646047045 countsByYear W26460470452023 @default.
• W2646047045 crossrefType "journal-article" @default.
• W2646047045 hasAuthorship W2646047045A5006538977 @default.
• W2646047045 hasAuthorship W2646047045A5006635439 @default.
• W2646047045 hasAuthorship W2646047045A5007704072 @default.
• W2646047045 hasAuthorship W2646047045A5009081483 @default.
• W2646047045 hasAuthorship W2646047045A5009512238 @default.
• W2646047045 hasAuthorship W2646047045A5009586090 @default.
• W2646047045 hasAuthorship W2646047045A5020622600 @default.
• W2646047045 hasAuthorship W2646047045A5029989684 @default.
• W2646047045 hasAuthorship W2646047045A5030275438 @default.
• W2646047045 hasAuthorship W2646047045A5034287544 @default.
• W2646047045 hasAuthorship W2646047045A5038024347 @default.
• W2646047045 hasAuthorship W2646047045A5044037036 @default.
• W2646047045 hasAuthorship W2646047045A5044209857 @default.
• W2646047045 hasAuthorship W2646047045A5046125690 @default.
• W2646047045 hasAuthorship W2646047045A5046242688 @default.
• W2646047045 hasAuthorship W2646047045A5047236007 @default.
• W2646047045 hasAuthorship W2646047045A5048366973 @default.
• W2646047045 hasAuthorship W2646047045A5049232971 @default.
• W2646047045 hasAuthorship W2646047045A5049394620 @default.
• W2646047045 hasAuthorship W2646047045A5054123509 @default.
• W2646047045 hasAuthorship W2646047045A5062072211 @default.
• W2646047045 hasAuthorship W2646047045A5064166800 @default.
• W2646047045 hasAuthorship W2646047045A5065848352 @default.
• W2646047045 hasAuthorship W2646047045A5069706368 @default.
• W2646047045 hasAuthorship W2646047045A5075183384 @default.
• W2646047045 hasAuthorship W2646047045A5075862918 @default.
• W2646047045 hasAuthorship W2646047045A5078372181 @default.
• W2646047045 hasAuthorship W2646047045A5079435576 @default.
• W2646047045 hasAuthorship W2646047045A5081272792 @default.
• W2646047045 hasConcept C119599485 @default.
• W2646047045 hasConcept C127413603 @default.
• W2646047045 hasConcept C136525101 @default.
• W2646047045 hasConcept C142724271 @default.
• W2646047045 hasConcept C159818811 @default.
• W2646047045 hasConcept C165801399 @default.
• W2646047045 hasConcept C171250308 @default.
• W2646047045 hasConcept C172385210 @default.
• W2646047045 hasConcept C192562407 @default.
• W2646047045 hasConcept C204787440 @default.
• W2646047045 hasConcept C2361726 @default.
• W2646047045 hasConcept C2778413303 @default.
• W2646047045 hasConcept C46362747 @default.
• W2646047045 hasConcept C49040817 @default.
• W2646047045 hasConcept C51140833 @default.
• W2646047045 hasConcept C61696701 @default.
• W2646047045 hasConcept C68043766 @default.
• W2646047045 hasConcept C71924100 @default.
• W2646047045 hasConcept C74214498 @default.
• W2646047045 hasConceptScore W2646047045C119599485 @default.
• W2646047045 hasConceptScore W2646047045C127413603 @default.
• W2646047045 hasConceptScore W2646047045C136525101 @default.
• W2646047045 hasConceptScore W2646047045C142724271 @default.
• W2646047045 hasConceptScore W2646047045C159818811 @default.

• next