FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2646342214> ?p ?o ?g. }

• W2646342214 abstract "This paper presents a novel method for measuring two-degree-of-freedom (DOF) motion of flexure-based nanopositioning systems based on optical knife-edge sensing (OKES) technology, which utilizes the interference of two superimposed waves: a geometrical wave from the primary source of light and a boundary diffraction wave from the secondary source. This technique allows for two-DOF motion measurement of the linear and pitch motions of nanopositioning systems. Two capacitive sensors (CSs) are used for a baseline comparison with the proposed sensor by simultaneously measuring the motions of the nanopositioning system. The experimental results show that the proposed sensor closely agrees with the fundamental linear motion of the CS. However, the two-DOF OKES technology was shown to be approximately three times more sensitive to the pitch motion than the CS. The discrepancy in the two sensor outputs is discussed in terms of measuring principle, linearity, bandwidth, control effectiveness, and resolution." @default.
• W2646342214 created "2017-06-30" @default.
• W2646342214 creator A5018117827 @default.
• W2646342214 creator A5020215997 @default.
• W2646342214 creator A5044343910 @default.
• W2646342214 creator A5051527891 @default.
• W2646342214 date "2017-06-01" @default.
• W2646342214 modified "2023-09-24" @default.
• W2646342214 title "A novel sensor for two-degree-of-freedom motion measurement of linear nanopositioning stage using knife edge displacement sensing technique" @default.
• W2646342214 cites W1065580805 @default.
• W2646342214 cites W1974231968 @default.
• W2646342214 cites W1998433210 @default.
• W2646342214 cites W2000791119 @default.
• W2646342214 cites W2012332710 @default.
• W2646342214 cites W2023618805 @default.
• W2646342214 cites W2033131427 @default.
• W2646342214 cites W2046013400 @default.
• W2646342214 cites W2058209887 @default.
• W2646342214 cites W2061568988 @default.
• W2646342214 cites W2075916174 @default.
• W2646342214 cites W2081753370 @default.
• W2646342214 cites W2338551598 @default.
• W2646342214 cites W2590348087 @default.
• W2646342214 doi "https://doi.org/10.1063/1.4989517" @default.
• W2646342214 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28667986" @default.
• W2646342214 hasPublicationYear "2017" @default.
• W2646342214 type Work @default.
• W2646342214 sameAs 2646342214 @default.
• W2646342214 citedByCount "9" @default.
• W2646342214 countsByYear W26463422142019 @default.
• W2646342214 countsByYear W26463422142020 @default.
• W2646342214 countsByYear W26463422142021 @default.
• W2646342214 countsByYear W26463422142022 @default.
• W2646342214 crossrefType "journal-article" @default.
• W2646342214 hasAuthorship W2646342214A5018117827 @default.
• W2646342214 hasAuthorship W2646342214A5020215997 @default.
• W2646342214 hasAuthorship W2646342214A5044343910 @default.
• W2646342214 hasAuthorship W2646342214A5051527891 @default.
• W2646342214 hasBestOaLocation W26463422141 @default.
• W2646342214 hasConcept C104114177 @default.
• W2646342214 hasConcept C107551265 @default.
• W2646342214 hasConcept C111919701 @default.
• W2646342214 hasConcept C120665830 @default.
• W2646342214 hasConcept C121332964 @default.
• W2646342214 hasConcept C127162648 @default.
• W2646342214 hasConcept C1276947 @default.
• W2646342214 hasConcept C144024400 @default.
• W2646342214 hasConcept C15744967 @default.
• W2646342214 hasConcept C206755178 @default.
• W2646342214 hasConcept C24890656 @default.
• W2646342214 hasConcept C2776257435 @default.
• W2646342214 hasConcept C32022120 @default.
• W2646342214 hasConcept C36289849 @default.
• W2646342214 hasConcept C37649242 @default.
• W2646342214 hasConcept C41008148 @default.
• W2646342214 hasConcept C542102704 @default.
• W2646342214 hasConcept C62520636 @default.
• W2646342214 hasConcept C74650414 @default.
• W2646342214 hasConcept C76155785 @default.
• W2646342214 hasConcept C77170095 @default.
• W2646342214 hasConcept C82979123 @default.
• W2646342214 hasConcept C98068282 @default.
• W2646342214 hasConceptScore W2646342214C104114177 @default.
• W2646342214 hasConceptScore W2646342214C107551265 @default.
• W2646342214 hasConceptScore W2646342214C111919701 @default.
• W2646342214 hasConceptScore W2646342214C120665830 @default.
• W2646342214 hasConceptScore W2646342214C121332964 @default.
• W2646342214 hasConceptScore W2646342214C127162648 @default.
• W2646342214 hasConceptScore W2646342214C1276947 @default.
• W2646342214 hasConceptScore W2646342214C144024400 @default.
• W2646342214 hasConceptScore W2646342214C15744967 @default.
• W2646342214 hasConceptScore W2646342214C206755178 @default.
• W2646342214 hasConceptScore W2646342214C24890656 @default.
• W2646342214 hasConceptScore W2646342214C2776257435 @default.
• W2646342214 hasConceptScore W2646342214C32022120 @default.
• W2646342214 hasConceptScore W2646342214C36289849 @default.
• W2646342214 hasConceptScore W2646342214C37649242 @default.
• W2646342214 hasConceptScore W2646342214C41008148 @default.
• W2646342214 hasConceptScore W2646342214C542102704 @default.
• W2646342214 hasConceptScore W2646342214C62520636 @default.
• W2646342214 hasConceptScore W2646342214C74650414 @default.
• W2646342214 hasConceptScore W2646342214C76155785 @default.
• W2646342214 hasConceptScore W2646342214C77170095 @default.
• W2646342214 hasConceptScore W2646342214C82979123 @default.
• W2646342214 hasConceptScore W2646342214C98068282 @default.
• W2646342214 hasFunder F4320306076 @default.
• W2646342214 hasIssue "6" @default.
• W2646342214 hasLocation W26463422141 @default.
• W2646342214 hasLocation W26463422142 @default.
• W2646342214 hasOpenAccess W2646342214 @default.
• W2646342214 hasPrimaryLocation W26463422141 @default.
• W2646342214 hasRelatedWork W2035297892 @default.
• W2646342214 hasRelatedWork W2059052102 @default.
• W2646342214 hasRelatedWork W2084562160 @default.
• W2646342214 hasRelatedWork W2126484173 @default.
• W2646342214 hasRelatedWork W2311869522 @default.
• W2646342214 hasRelatedWork W2354051111 @default.
• W2646342214 hasRelatedWork W2386374934 @default.
• W2646342214 hasRelatedWork W2594452699 @default.
• W2646342214 hasRelatedWork W2646342214 @default.

• next