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- W266830131 abstract "DBD(Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductor. The cleaning performance is affected mainly by plasma density and duration time. In this study, the plasma density is predicted by coupled simulation of flow, chemistry mixing and reaction, plasma, and electric field. 13.56 MHz of RF source is used to generate plasma. The effect of dielectric thickness, gap distance, and flow velocity on plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases and the gap distance increases." @default.
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- W266830131 date "2009-01-01" @default.
- W266830131 modified "2023-09-24" @default.
- W266830131 title "An Analysis of Vacuum Plasma Phenomena in DBD(Dielectric Barrier Discharges)" @default.
- W266830131 hasPublicationYear "2009" @default.
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