Matches in SemOpenAlex for { <https://semopenalex.org/work/W2668822080> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2668822080 endingPage "236" @default.
- W2668822080 startingPage "235" @default.
- W2668822080 abstract "Polishing performances of mC^2 (low down force CMP), ECP-DI (Electro-Chemical Polishing in DI water) and ECP-C (Electro-Chemical Polishing in Chemical) are compared as a candidate of planarization technology for the next generation. Each planarization technology shows high removal rate under the low down force condition and excellent planarization performance. However, Dishing increases rapidly in ECP-DI and ECP-C after Cu Clear because of electro-chemical etching. In our experimental data, mC^2 is superior to ECP-DI and ECP-C for polishing performance. In addition, ECP-DI has large advantage for CoC, because ECP-DI doesn't basically use any chemical." @default.
- W2668822080 created "2017-06-30" @default.
- W2668822080 creator A5006643526 @default.
- W2668822080 creator A5015687990 @default.
- W2668822080 creator A5024968104 @default.
- W2668822080 creator A5036485052 @default.
- W2668822080 creator A5044744198 @default.
- W2668822080 creator A5057488529 @default.
- W2668822080 creator A5065375309 @default.
- W2668822080 creator A5081022851 @default.
- W2668822080 date "2007-01-01" @default.
- W2668822080 modified "2023-09-26" @default.
- W2668822080 title "21710 Comparison of the Planarization Technologies for the Next Generation" @default.
- W2668822080 doi "https://doi.org/10.1299/jsmekanto.2007.13.235" @default.
- W2668822080 hasPublicationYear "2007" @default.
- W2668822080 type Work @default.
- W2668822080 sameAs 2668822080 @default.
- W2668822080 citedByCount "0" @default.
- W2668822080 crossrefType "journal-article" @default.
- W2668822080 hasAuthorship W2668822080A5006643526 @default.
- W2668822080 hasAuthorship W2668822080A5015687990 @default.
- W2668822080 hasAuthorship W2668822080A5024968104 @default.
- W2668822080 hasAuthorship W2668822080A5036485052 @default.
- W2668822080 hasAuthorship W2668822080A5044744198 @default.
- W2668822080 hasAuthorship W2668822080A5057488529 @default.
- W2668822080 hasAuthorship W2668822080A5065375309 @default.
- W2668822080 hasAuthorship W2668822080A5081022851 @default.
- W2668822080 hasConcept C100460472 @default.
- W2668822080 hasConcept C138113353 @default.
- W2668822080 hasConcept C171250308 @default.
- W2668822080 hasConcept C180088628 @default.
- W2668822080 hasConcept C191897082 @default.
- W2668822080 hasConcept C192562407 @default.
- W2668822080 hasConcept C2779227376 @default.
- W2668822080 hasConcept C33220542 @default.
- W2668822080 hasConcept C49040817 @default.
- W2668822080 hasConceptScore W2668822080C100460472 @default.
- W2668822080 hasConceptScore W2668822080C138113353 @default.
- W2668822080 hasConceptScore W2668822080C171250308 @default.
- W2668822080 hasConceptScore W2668822080C180088628 @default.
- W2668822080 hasConceptScore W2668822080C191897082 @default.
- W2668822080 hasConceptScore W2668822080C192562407 @default.
- W2668822080 hasConceptScore W2668822080C2779227376 @default.
- W2668822080 hasConceptScore W2668822080C33220542 @default.
- W2668822080 hasConceptScore W2668822080C49040817 @default.
- W2668822080 hasIssue "0" @default.
- W2668822080 hasLocation W26688220801 @default.
- W2668822080 hasOpenAccess W2668822080 @default.
- W2668822080 hasPrimaryLocation W26688220801 @default.
- W2668822080 hasRelatedWork W1490510726 @default.
- W2668822080 hasRelatedWork W2030816591 @default.
- W2668822080 hasRelatedWork W2065190630 @default.
- W2668822080 hasRelatedWork W2094636678 @default.
- W2668822080 hasRelatedWork W2268953489 @default.
- W2668822080 hasRelatedWork W2568636200 @default.
- W2668822080 hasRelatedWork W2767803354 @default.
- W2668822080 hasRelatedWork W3011280489 @default.
- W2668822080 hasRelatedWork W749211866 @default.
- W2668822080 hasRelatedWork W2117073465 @default.
- W2668822080 hasVolume "2007.13" @default.
- W2668822080 isParatext "false" @default.
- W2668822080 isRetracted "false" @default.
- W2668822080 magId "2668822080" @default.
- W2668822080 workType "article" @default.