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- W2698151110 endingPage "168" @default.
- W2698151110 startingPage "167" @default.
- W2698151110 abstract "Over the past few years, a considerable number of new semiconductors have been developed. Furthermore, semiconductor pattern is more and more fine and thin. Contact-control problem is one of the most important problems. Our ultimate goal is to develop a soft-contact-probing system making good use of multi sensor-information. This paper presents a new experiment system and that sensor-information is very important to probing and micro-manipulation." @default.
- W2698151110 created "2017-06-30" @default.
- W2698151110 creator A5017460099 @default.
- W2698151110 creator A5018638511 @default.
- W2698151110 creator A5021425587 @default.
- W2698151110 creator A5072930521 @default.
- W2698151110 date "2003-01-01" @default.
- W2698151110 modified "2023-10-05" @default.
- W2698151110 title "Sensor Based on Micro-Manipulation : Study of Contact-control probing system" @default.
- W2698151110 doi "https://doi.org/10.1299/jsmeibaraki.2003.167" @default.
- W2698151110 hasPublicationYear "2003" @default.
- W2698151110 type Work @default.
- W2698151110 sameAs 2698151110 @default.
- W2698151110 citedByCount "0" @default.
- W2698151110 crossrefType "journal-article" @default.
- W2698151110 hasAuthorship W2698151110A5017460099 @default.
- W2698151110 hasAuthorship W2698151110A5018638511 @default.
- W2698151110 hasAuthorship W2698151110A5021425587 @default.
- W2698151110 hasAuthorship W2698151110A5072930521 @default.
- W2698151110 hasBestOaLocation W26981511101 @default.
- W2698151110 hasConcept C108225325 @default.
- W2698151110 hasConcept C119599485 @default.
- W2698151110 hasConcept C127413603 @default.
- W2698151110 hasConcept C154945302 @default.
- W2698151110 hasConcept C17500928 @default.
- W2698151110 hasConcept C2775924081 @default.
- W2698151110 hasConcept C41008148 @default.
- W2698151110 hasConceptScore W2698151110C108225325 @default.
- W2698151110 hasConceptScore W2698151110C119599485 @default.
- W2698151110 hasConceptScore W2698151110C127413603 @default.
- W2698151110 hasConceptScore W2698151110C154945302 @default.
- W2698151110 hasConceptScore W2698151110C17500928 @default.
- W2698151110 hasConceptScore W2698151110C2775924081 @default.
- W2698151110 hasConceptScore W2698151110C41008148 @default.
- W2698151110 hasIssue "0" @default.
- W2698151110 hasLocation W26981511101 @default.
- W2698151110 hasOpenAccess W2698151110 @default.
- W2698151110 hasPrimaryLocation W26981511101 @default.
- W2698151110 hasRelatedWork W1522672041 @default.
- W2698151110 hasRelatedWork W2155245395 @default.
- W2698151110 hasRelatedWork W2355865573 @default.
- W2698151110 hasRelatedWork W2356720399 @default.
- W2698151110 hasRelatedWork W2367156532 @default.
- W2698151110 hasRelatedWork W2368625331 @default.
- W2698151110 hasRelatedWork W2378382189 @default.
- W2698151110 hasRelatedWork W2380614390 @default.
- W2698151110 hasRelatedWork W2390673655 @default.
- W2698151110 hasRelatedWork W2899084033 @default.
- W2698151110 hasVolume "2003" @default.
- W2698151110 isParatext "false" @default.
- W2698151110 isRetracted "false" @default.
- W2698151110 magId "2698151110" @default.
- W2698151110 workType "article" @default.