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- W2699393325 startingPage "555" @default.
- W2699393325 abstract "In order to clarify the phenomenon and effect upon the dresser to refresh the polishing pad surface in CMP process. A single point dressing processing on the surface of the polishing pad with a diamond bite was observed by a high-speed camera. Machining scar can be seen on the edge portion of the pore on the polishing pad surface. Deformation of the polishing pad surface was also observed with a microscope" @default.
- W2699393325 created "2017-06-30" @default.
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- W2699393325 date "2013-01-01" @default.
- W2699393325 modified "2023-09-27" @default.
- W2699393325 title "21211 Study on mechanism of polishing pad surface dressing" @default.
- W2699393325 doi "https://doi.org/10.1299/jsmekanto.2013.19.555" @default.
- W2699393325 hasPublicationYear "2013" @default.
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