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- W2709205198 abstract "In order to fabricate Au micromirrors using a method of simultaneous molding and low-temperature Au-Au bonding, a fabrication method of molding and bonding tools using diamond blade dicing is investigated. Diamond blade dicing of synthetic quartz glass substrates produced smooth sidewall surfaces with root-mean-square roughness of 8 nm in the sample translation direction and that of 56 nm in the perpendicular to the translation direction. Using these fabricated tools, Au micromirrors were successfully formed at 150 °C." @default.
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- W2709205198 date "2017-05-01" @default.
- W2709205198 modified "2023-10-03" @default.
- W2709205198 title "Fabrication and evaluation of molding and bonding tools for Au micromirror formation" @default.
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- W2709205198 doi "https://doi.org/10.23919/ltb-3d.2017.7947480" @default.
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