Matches in SemOpenAlex for { <https://semopenalex.org/work/W2710639953> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2710639953 endingPage "6_" @default.
- W2710639953 startingPage "_5" @default.
- W2710639953 abstract "Our study uses two kinds of Silicon materials which are N-type and P type. The purpose of our study is to investigate the effect of Silicon conduction type on high-aspect-ratio deep etching rate. As a result, it became clear that P-type Silicon has higher etching rate than N-type Silicon on the fabrication condition where the chemical etching process is more dominant than physical etching process." @default.
- W2710639953 created "2017-06-30" @default.
- W2710639953 creator A5029255005 @default.
- W2710639953 creator A5037834035 @default.
- W2710639953 creator A5052277120 @default.
- W2710639953 creator A5076842305 @default.
- W2710639953 date "2003-01-01" @default.
- W2710639953 modified "2023-09-25" @default.
- W2710639953 title "A study of three-dimensional high-aspect ratio micro-machining" @default.
- W2710639953 doi "https://doi.org/10.1299/jsmekansai.2003.78._5-5_" @default.
- W2710639953 hasPublicationYear "2003" @default.
- W2710639953 type Work @default.
- W2710639953 sameAs 2710639953 @default.
- W2710639953 citedByCount "0" @default.
- W2710639953 crossrefType "journal-article" @default.
- W2710639953 hasAuthorship W2710639953A5029255005 @default.
- W2710639953 hasAuthorship W2710639953A5037834035 @default.
- W2710639953 hasAuthorship W2710639953A5052277120 @default.
- W2710639953 hasAuthorship W2710639953A5076842305 @default.
- W2710639953 hasBestOaLocation W27106399531 @default.
- W2710639953 hasConcept C100460472 @default.
- W2710639953 hasConcept C1291036 @default.
- W2710639953 hasConcept C136525101 @default.
- W2710639953 hasConcept C142724271 @default.
- W2710639953 hasConcept C171250308 @default.
- W2710639953 hasConcept C191897082 @default.
- W2710639953 hasConcept C192562407 @default.
- W2710639953 hasConcept C204787440 @default.
- W2710639953 hasConcept C2779227376 @default.
- W2710639953 hasConcept C33220542 @default.
- W2710639953 hasConcept C49040817 @default.
- W2710639953 hasConcept C523214423 @default.
- W2710639953 hasConcept C544956773 @default.
- W2710639953 hasConcept C71924100 @default.
- W2710639953 hasConcept C82558694 @default.
- W2710639953 hasConceptScore W2710639953C100460472 @default.
- W2710639953 hasConceptScore W2710639953C1291036 @default.
- W2710639953 hasConceptScore W2710639953C136525101 @default.
- W2710639953 hasConceptScore W2710639953C142724271 @default.
- W2710639953 hasConceptScore W2710639953C171250308 @default.
- W2710639953 hasConceptScore W2710639953C191897082 @default.
- W2710639953 hasConceptScore W2710639953C192562407 @default.
- W2710639953 hasConceptScore W2710639953C204787440 @default.
- W2710639953 hasConceptScore W2710639953C2779227376 @default.
- W2710639953 hasConceptScore W2710639953C33220542 @default.
- W2710639953 hasConceptScore W2710639953C49040817 @default.
- W2710639953 hasConceptScore W2710639953C523214423 @default.
- W2710639953 hasConceptScore W2710639953C544956773 @default.
- W2710639953 hasConceptScore W2710639953C71924100 @default.
- W2710639953 hasConceptScore W2710639953C82558694 @default.
- W2710639953 hasIssue "0" @default.
- W2710639953 hasLocation W27106399531 @default.
- W2710639953 hasOpenAccess W2710639953 @default.
- W2710639953 hasPrimaryLocation W27106399531 @default.
- W2710639953 hasRelatedWork W1584171941 @default.
- W2710639953 hasRelatedWork W1983405440 @default.
- W2710639953 hasRelatedWork W2000975590 @default.
- W2710639953 hasRelatedWork W2039850519 @default.
- W2710639953 hasRelatedWork W2044366676 @default.
- W2710639953 hasRelatedWork W2061467226 @default.
- W2710639953 hasRelatedWork W2322197603 @default.
- W2710639953 hasRelatedWork W2322704670 @default.
- W2710639953 hasRelatedWork W2519768913 @default.
- W2710639953 hasRelatedWork W2093649186 @default.
- W2710639953 hasVolume "2003.78" @default.
- W2710639953 isParatext "false" @default.
- W2710639953 isRetracted "false" @default.
- W2710639953 magId "2710639953" @default.
- W2710639953 workType "article" @default.