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- W2715635719 endingPage "216" @default.
- W2715635719 startingPage "215" @default.
- W2715635719 abstract "This paper provides effects of removal surface on fracture toughness of single crystal silicon wafers based on controlled surface flaw (CSF) method. Fracture toughness (K_<IC>) of single crystal silicon was measured with removed indentation crack surface by ion shower. Experimental results showed that optimum removal surface to measure the fracture toughness of single crystal silicon wafer based on CSF method." @default.
- W2715635719 created "2017-06-30" @default.
- W2715635719 creator A5008383116 @default.
- W2715635719 creator A5014314707 @default.
- W2715635719 creator A5031512151 @default.
- W2715635719 creator A5080618677 @default.
- W2715635719 date "2013-01-01" @default.
- W2715635719 modified "2023-10-02" @default.
- W2715635719 title "20115 Effects of Removal Surface on Fracture Toughness of Single Crystal Silicon" @default.
- W2715635719 doi "https://doi.org/10.1299/jsmekanto.2013.19.215" @default.
- W2715635719 hasPublicationYear "2013" @default.
- W2715635719 type Work @default.
- W2715635719 sameAs 2715635719 @default.
- W2715635719 citedByCount "0" @default.
- W2715635719 crossrefType "journal-article" @default.
- W2715635719 hasAuthorship W2715635719A5008383116 @default.
- W2715635719 hasAuthorship W2715635719A5014314707 @default.
- W2715635719 hasAuthorship W2715635719A5031512151 @default.
- W2715635719 hasAuthorship W2715635719A5080618677 @default.
- W2715635719 hasBestOaLocation W27156357191 @default.
- W2715635719 hasConcept C127413603 @default.
- W2715635719 hasConcept C159985019 @default.
- W2715635719 hasConcept C160671074 @default.
- W2715635719 hasConcept C185592680 @default.
- W2715635719 hasConcept C191897082 @default.
- W2715635719 hasConcept C192562407 @default.
- W2715635719 hasConcept C199360897 @default.
- W2715635719 hasConcept C2780902562 @default.
- W2715635719 hasConcept C2781285689 @default.
- W2715635719 hasConcept C41008148 @default.
- W2715635719 hasConcept C43369102 @default.
- W2715635719 hasConcept C49040817 @default.
- W2715635719 hasConcept C544956773 @default.
- W2715635719 hasConcept C73922627 @default.
- W2715635719 hasConcept C77595967 @default.
- W2715635719 hasConcept C8010536 @default.
- W2715635719 hasConcept C97549433 @default.
- W2715635719 hasConceptScore W2715635719C127413603 @default.
- W2715635719 hasConceptScore W2715635719C159985019 @default.
- W2715635719 hasConceptScore W2715635719C160671074 @default.
- W2715635719 hasConceptScore W2715635719C185592680 @default.
- W2715635719 hasConceptScore W2715635719C191897082 @default.
- W2715635719 hasConceptScore W2715635719C192562407 @default.
- W2715635719 hasConceptScore W2715635719C199360897 @default.
- W2715635719 hasConceptScore W2715635719C2780902562 @default.
- W2715635719 hasConceptScore W2715635719C2781285689 @default.
- W2715635719 hasConceptScore W2715635719C41008148 @default.
- W2715635719 hasConceptScore W2715635719C43369102 @default.
- W2715635719 hasConceptScore W2715635719C49040817 @default.
- W2715635719 hasConceptScore W2715635719C544956773 @default.
- W2715635719 hasConceptScore W2715635719C73922627 @default.
- W2715635719 hasConceptScore W2715635719C77595967 @default.
- W2715635719 hasConceptScore W2715635719C8010536 @default.
- W2715635719 hasConceptScore W2715635719C97549433 @default.
- W2715635719 hasIssue "0" @default.
- W2715635719 hasLocation W27156357191 @default.
- W2715635719 hasOpenAccess W2715635719 @default.
- W2715635719 hasPrimaryLocation W27156357191 @default.
- W2715635719 hasRelatedWork W2023368805 @default.
- W2715635719 hasRelatedWork W2039999818 @default.
- W2715635719 hasRelatedWork W2054723389 @default.
- W2715635719 hasRelatedWork W2322742948 @default.
- W2715635719 hasRelatedWork W2358089549 @default.
- W2715635719 hasRelatedWork W2391612727 @default.
- W2715635719 hasRelatedWork W2941272370 @default.
- W2715635719 hasRelatedWork W3017982862 @default.
- W2715635719 hasRelatedWork W4239754312 @default.
- W2715635719 hasRelatedWork W4283375541 @default.
- W2715635719 hasVolume "2013.19" @default.
- W2715635719 isParatext "false" @default.
- W2715635719 isRetracted "false" @default.
- W2715635719 magId "2715635719" @default.
- W2715635719 workType "article" @default.