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- W2724565372 abstract "As the industry continues to move toward production in the 64- and 256-MB technology regime, the challenges posed by more stringent requirements associated with wafer lithography and reticle manufacturing are driving developments which may be out-pacing the ability of the industry to guarantee reticle performance." @default.
- W2724565372 created "2017-07-14" @default.
- W2724565372 creator A5071570932 @default.
- W2724565372 date "1994-01-01" @default.
- W2724565372 modified "2023-09-29" @default.
- W2724565372 title "Mask quality assurance from a user's perspective" @default.
- W2724565372 doi "https://doi.org/10.1117/12.177434" @default.
- W2724565372 hasPublicationYear "1994" @default.
- W2724565372 type Work @default.
- W2724565372 sameAs 2724565372 @default.
- W2724565372 citedByCount "0" @default.
- W2724565372 crossrefType "proceedings-article" @default.
- W2724565372 hasAuthorship W2724565372A5071570932 @default.
- W2724565372 hasConcept C106436119 @default.
- W2724565372 hasConcept C117671659 @default.
- W2724565372 hasConcept C119599485 @default.
- W2724565372 hasConcept C120665830 @default.
- W2724565372 hasConcept C121332964 @default.
- W2724565372 hasConcept C12713177 @default.
- W2724565372 hasConcept C127413603 @default.
- W2724565372 hasConcept C146617872 @default.
- W2724565372 hasConcept C154945302 @default.
- W2724565372 hasConcept C160671074 @default.
- W2724565372 hasConcept C201995342 @default.
- W2724565372 hasConcept C204223013 @default.
- W2724565372 hasConcept C21547014 @default.
- W2724565372 hasConcept C2778618615 @default.
- W2724565372 hasConcept C2779530757 @default.
- W2724565372 hasConcept C41008148 @default.
- W2724565372 hasConcept C62520636 @default.
- W2724565372 hasConceptScore W2724565372C106436119 @default.
- W2724565372 hasConceptScore W2724565372C117671659 @default.
- W2724565372 hasConceptScore W2724565372C119599485 @default.
- W2724565372 hasConceptScore W2724565372C120665830 @default.
- W2724565372 hasConceptScore W2724565372C121332964 @default.
- W2724565372 hasConceptScore W2724565372C12713177 @default.
- W2724565372 hasConceptScore W2724565372C127413603 @default.
- W2724565372 hasConceptScore W2724565372C146617872 @default.
- W2724565372 hasConceptScore W2724565372C154945302 @default.
- W2724565372 hasConceptScore W2724565372C160671074 @default.
- W2724565372 hasConceptScore W2724565372C201995342 @default.
- W2724565372 hasConceptScore W2724565372C204223013 @default.
- W2724565372 hasConceptScore W2724565372C21547014 @default.
- W2724565372 hasConceptScore W2724565372C2778618615 @default.
- W2724565372 hasConceptScore W2724565372C2779530757 @default.
- W2724565372 hasConceptScore W2724565372C41008148 @default.
- W2724565372 hasConceptScore W2724565372C62520636 @default.
- W2724565372 hasLocation W27245653721 @default.
- W2724565372 hasOpenAccess W2724565372 @default.
- W2724565372 hasPrimaryLocation W27245653721 @default.
- W2724565372 hasRelatedWork W1627097401 @default.
- W2724565372 hasRelatedWork W1666621032 @default.
- W2724565372 hasRelatedWork W1965415919 @default.
- W2724565372 hasRelatedWork W1967508201 @default.
- W2724565372 hasRelatedWork W1967931654 @default.
- W2724565372 hasRelatedWork W1980037505 @default.
- W2724565372 hasRelatedWork W2020306129 @default.
- W2724565372 hasRelatedWork W2039715031 @default.
- W2724565372 hasRelatedWork W2044476951 @default.
- W2724565372 hasRelatedWork W2055068102 @default.
- W2724565372 hasRelatedWork W2060503557 @default.
- W2724565372 hasRelatedWork W2122305933 @default.
- W2724565372 hasRelatedWork W2166087127 @default.
- W2724565372 hasRelatedWork W2547674420 @default.
- W2724565372 hasRelatedWork W2572731597 @default.
- W2724565372 hasRelatedWork W2728761735 @default.
- W2724565372 hasRelatedWork W2733219055 @default.
- W2724565372 hasRelatedWork W2955697071 @default.
- W2724565372 hasRelatedWork W3131370132 @default.
- W2724565372 hasRelatedWork W847223523 @default.
- W2724565372 isParatext "false" @default.
- W2724565372 isRetracted "false" @default.
- W2724565372 magId "2724565372" @default.
- W2724565372 workType "article" @default.