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- W2724741864 abstract "Abstract A micro-Pirani gauge, operating in the range of vacuum to atmospheric pressure, is designed, fabricated and characterized. The proposed micro-Pirani gauge is fabricated on a commercially available silicon-on-insulator (SOI) wafer with a simple micromachining technique. Since the micro-Pirani gauge has one heater with triple heat sinks, a new mathematical model is developed and validated with the experimental results. By using the mathematical model, the design parameters—thickness, width, and length of the heater and the gaps between the heater and heat sinks—are optimized for attaining a wide operating range of 0.05–760 Torr. The heater dimensions and gaps in the optimized micro-Pirani gauge are as follows: thickness of 1.5 μm, width of 3 μm, and length of 350 μm for the heater, and gaps of 0.6 and 1 μm in the lateral and vertical directions, respectively. The total area of the micro-Pirani gauge, including the four bond pads, is 950 × 700 μm 2 ." @default.
- W2724741864 created "2017-07-14" @default.
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- W2724741864 date "2017-08-01" @default.
- W2724741864 modified "2023-10-06" @default.
- W2724741864 title "Performance enhancement of Pirani gauge on silicon-on-insulator wafer with simple fabrication process" @default.
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- W2724741864 doi "https://doi.org/10.1016/j.sna.2017.06.032" @default.
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