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- W2725310054 abstract "A spectral-domain Optical Coherence Tomography (OCT) surface profilometry prototype has been developed for thepurpose of surface metrology of optical elements. The prototype consists of a light source, spectral interferometer,sample fixture and software currently running on Microsoft® Windows platforms. In this system, a broadband lightemitting diode beam is focused into a Michelson interferometer with a plane mirror as its sample fixture. At theinterferometer output, spectral interferograms of broadband sources were measured using a Czerny-Turner mountmonochromator with a 2048-element complementary metal oxide semiconductor linear array as the detector. Thesoftware performs importation and interpolation of interferometer spectra to pre-condition the data for imagecomputation. One dimensional axial OCT images were computed by Fourier transformation of the measured spectra. Afirst reflection surface profilometry (FRSP) algorithm was then formulated to perform imaging of step-function-surfacedsamples. The algorithm re-constructs two dimensional colour-scaled slice images by concatenation of 21 and 13 axialscans to form a 10 mm and 3.0 mm slice respectively. Measured spectral interferograms, computed interference fringesignals and depth reflectivity profiles were comparable to simulations and correlated to displacements of a singlereflector linearly translated about the arm null-mismatch point. Surface profile images of a double-step-function-surfacedsample, embedded with inclination and crack detail were plotted with an axial resolution of 11 μm. The surface shape,defects and misalignment relative to the incident beam were detected to the order of a micron, confirming high resolutionof the developed system as compared to electro-mechanical surface profilometry techniques." @default.
- W2725310054 created "2017-07-14" @default.
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- W2725310054 date "2017-06-26" @default.
- W2725310054 modified "2023-09-23" @default.
- W2725310054 title "Development of a low-cost, 11 µm spectral domain optical coherence tomography surface profilometry prototype" @default.
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- W2725310054 doi "https://doi.org/10.1117/12.2268064" @default.
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