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- W2726658230 abstract "We present a high-resolution Linnik scanning white-light interferometer (SWLI) with integrated distance measuringinterferometer (DMI) for close-to-machine applications in the presence of environmental vibrations. The distance,measured by DMI during the depth-scan, is used for vibration compensation of SWLI signals. The reconstruction of thewhite-light interference signals takes place after measurement by reordering the captured images in accordance with theirreal positions obtained by the DMI and subsequent trigonometrical approximation. This system is the further developmentof our previously presented Michelson-interferometer. We are able to compensate for arbitrary vibrations with frequenciesup to several kilohertz and amplitudes in the lower micrometer range. Completely distorted SWLI signals can bereconstructed and the surface topography can be obtained with high accuracy. We demonstrate the feasibility of the methodby examples of practical measurements with and without vibrational disturbances." @default.
- W2726658230 created "2017-07-14" @default.
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- W2726658230 date "2017-06-26" @default.
- W2726658230 modified "2023-09-25" @default.
- W2726658230 title "Vibration compensated high-resolution scanning white-light Linnik-interferometer" @default.
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- W2726658230 doi "https://doi.org/10.1117/12.2270226" @default.
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