Matches in SemOpenAlex for { <https://semopenalex.org/work/W2728754564> ?p ?o ?g. }
- W2728754564 abstract "Abstract In this work, we report on the protective effect of platinum and carbon based films deposited onto Cu surfaces subject to pre-bonding temperature stress. The protection of Cu surfaces is an important and advantageous procedure to improve the reliability of Cu-Cu connections. The results were obtained from combined non-destructive Scanning Electron Microscopy (SEM) techniques and PeakForce Kelvin Probe Force Microscopy (PF-KPFM). As an indicator of degradation, the oxidation of the Cu surface was used. It could be shown that a C layer provides a much better protective effect than a Pt layer. Besides very local sporadically distributed Cu oxide grains, a gradual degradation of the protective carbon film was not even observable at the nanoscale for a stress temperature of 200 °C and layer thicknesses down to 3 nm. In contrast, with a 10 nm thick Pt film the Cu surface exhibits already at a stress temperature of 150 °C locally grown Cu oxide grains. The introduced carbon coating passivation of Cu surfaces has the potential of being a key technique for a reliable Cu-Cu wire bonding." @default.
- W2728754564 created "2017-07-14" @default.
- W2728754564 creator A5013454336 @default.
- W2728754564 creator A5015618456 @default.
- W2728754564 creator A5031788013 @default.
- W2728754564 creator A5058670975 @default.
- W2728754564 creator A5058680153 @default.
- W2728754564 creator A5087097522 @default.
- W2728754564 date "2017-09-01" @default.
- W2728754564 modified "2023-09-27" @default.
- W2728754564 title "Protective nanometer films for reliable Cu-Cu connections" @default.
- W2728754564 cites W1971897257 @default.
- W2728754564 cites W2002407860 @default.
- W2728754564 cites W2010691317 @default.
- W2728754564 cites W2019111939 @default.
- W2728754564 cites W2022761333 @default.
- W2728754564 cites W2028049063 @default.
- W2728754564 cites W2034144636 @default.
- W2728754564 cites W2043553031 @default.
- W2728754564 cites W2052746811 @default.
- W2728754564 cites W2080520915 @default.
- W2728754564 cites W2095926244 @default.
- W2728754564 cites W2104222848 @default.
- W2728754564 cites W2137541525 @default.
- W2728754564 cites W2142869300 @default.
- W2728754564 cites W2183945934 @default.
- W2728754564 doi "https://doi.org/10.1016/j.microrel.2017.07.001" @default.
- W2728754564 hasPublicationYear "2017" @default.
- W2728754564 type Work @default.
- W2728754564 sameAs 2728754564 @default.
- W2728754564 citedByCount "0" @default.
- W2728754564 crossrefType "journal-article" @default.
- W2728754564 hasAuthorship W2728754564A5013454336 @default.
- W2728754564 hasAuthorship W2728754564A5015618456 @default.
- W2728754564 hasAuthorship W2728754564A5031788013 @default.
- W2728754564 hasAuthorship W2728754564A5058670975 @default.
- W2728754564 hasAuthorship W2728754564A5058680153 @default.
- W2728754564 hasAuthorship W2728754564A5087097522 @default.
- W2728754564 hasConcept C102951782 @default.
- W2728754564 hasConcept C104779481 @default.
- W2728754564 hasConcept C127413603 @default.
- W2728754564 hasConcept C138885662 @default.
- W2728754564 hasConcept C140205800 @default.
- W2728754564 hasConcept C159985019 @default.
- W2728754564 hasConcept C171250308 @default.
- W2728754564 hasConcept C191897082 @default.
- W2728754564 hasConcept C192562407 @default.
- W2728754564 hasConcept C21036866 @default.
- W2728754564 hasConcept C24326235 @default.
- W2728754564 hasConcept C26771246 @default.
- W2728754564 hasConcept C2779227376 @default.
- W2728754564 hasConcept C2779679103 @default.
- W2728754564 hasConcept C2779851234 @default.
- W2728754564 hasConcept C2781448156 @default.
- W2728754564 hasConcept C33574316 @default.
- W2728754564 hasConcept C41895202 @default.
- W2728754564 hasConcept C42360764 @default.
- W2728754564 hasConcept C45206210 @default.
- W2728754564 hasConcept C544153396 @default.
- W2728754564 hasConcept C77066764 @default.
- W2728754564 hasConcept C83898325 @default.
- W2728754564 hasConceptScore W2728754564C102951782 @default.
- W2728754564 hasConceptScore W2728754564C104779481 @default.
- W2728754564 hasConceptScore W2728754564C127413603 @default.
- W2728754564 hasConceptScore W2728754564C138885662 @default.
- W2728754564 hasConceptScore W2728754564C140205800 @default.
- W2728754564 hasConceptScore W2728754564C159985019 @default.
- W2728754564 hasConceptScore W2728754564C171250308 @default.
- W2728754564 hasConceptScore W2728754564C191897082 @default.
- W2728754564 hasConceptScore W2728754564C192562407 @default.
- W2728754564 hasConceptScore W2728754564C21036866 @default.
- W2728754564 hasConceptScore W2728754564C24326235 @default.
- W2728754564 hasConceptScore W2728754564C26771246 @default.
- W2728754564 hasConceptScore W2728754564C2779227376 @default.
- W2728754564 hasConceptScore W2728754564C2779679103 @default.
- W2728754564 hasConceptScore W2728754564C2779851234 @default.
- W2728754564 hasConceptScore W2728754564C2781448156 @default.
- W2728754564 hasConceptScore W2728754564C33574316 @default.
- W2728754564 hasConceptScore W2728754564C41895202 @default.
- W2728754564 hasConceptScore W2728754564C42360764 @default.
- W2728754564 hasConceptScore W2728754564C45206210 @default.
- W2728754564 hasConceptScore W2728754564C544153396 @default.
- W2728754564 hasConceptScore W2728754564C77066764 @default.
- W2728754564 hasConceptScore W2728754564C83898325 @default.
- W2728754564 hasLocation W27287545641 @default.
- W2728754564 hasOpenAccess W2728754564 @default.
- W2728754564 hasPrimaryLocation W27287545641 @default.
- W2728754564 hasRelatedWork W1983361772 @default.
- W2728754564 hasRelatedWork W1986978148 @default.
- W2728754564 hasRelatedWork W2003799633 @default.
- W2728754564 hasRelatedWork W2041075056 @default.
- W2728754564 hasRelatedWork W2052402953 @default.
- W2728754564 hasRelatedWork W2061063742 @default.
- W2728754564 hasRelatedWork W2063997500 @default.
- W2728754564 hasRelatedWork W2066230897 @default.
- W2728754564 hasRelatedWork W2068678894 @default.
- W2728754564 hasRelatedWork W2069318076 @default.
- W2728754564 hasRelatedWork W2086969905 @default.
- W2728754564 hasRelatedWork W2153761808 @default.
- W2728754564 hasRelatedWork W2316195195 @default.