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• W2730116547 abstract "In this contribution, we propose a method of digital holographic microscopy (DHM) that enables measurement of highnumerical aperture spherical and aspherical microstructures of both concave and convex shapes. The proposed methodutilizes reflection of the spherical illumination beam from the object surface and the interference with a sphericalreference beam of the similar curvature. In this case, the NA of DHM is fully utilized for illumination and imaging of thereflected object beam. Thus, the system allows capturing the phase coming from larger areas of the quasi-sphericalobject and, therefore, offers possibility of high accuracy characterization of its surface even in the areas of highinclination. The proposed measurement procedure allows determining all parameters required for the accurate shaperecovery: the location of the object focus point and the positions of the illumination and reference point sources. Theutility of the method is demonstrated with characterization of surface of high NA focusing objects. The accuracy isfirstly verified by characterization of a known reference sphere with low error of sphericity. Then, the method is appliedfor shape measurement of spherical and aspheric microlenses. The results provide a full-field reconstruction of high NAtopography with resolution in the nanometer range. The surface sphericity is evaluated by the deviation from the bestfitted sphere or asphere, and the important parameters of the measured microlens: e.g.: radius of curvature and conicconstant." @default.
• W2730116547 created "2017-07-14" @default.
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• W2730116547 date "2017-06-26" @default.
• W2730116547 modified "2023-09-23" @default.
• W2730116547 title "Topography measurements of high NA aspherical microlenses by digital holographic microscopy with spherical illumination" @default.
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• W2730116547 doi "https://doi.org/10.1117/12.2270150" @default.
• W2730116547 hasPublicationYear "2017" @default.
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