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- W2730672501 abstract "The article describes a new optical scheme of noncontact sensor for measuring linear displacement - linear encoder.This sensor is an optical device in which the measurement of displacement is performed by analyzing the optical signal,which pass through two diffraction gratings, one of which is moved relative to the other. The optical signal is obtained bythe diffraction of light in these diffraction gratings and subsequent interference of diffracted beams. Often this type ofsensors are multi-channel devices with symmetrically positioned of detectors. This scheme is proposed to use a multisectionphase mask that allows to make a small-sized sensor. Sections of this multi-section phase mask are the opticalwindows and they made the final interference signals to be shifted relative to each other in phase. The number of sectionsin the multi-section phase mask can be varied. Estimated sufficient number of sections is four or more." @default.
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- W2730672501 date "2017-06-26" @default.
- W2730672501 modified "2023-09-23" @default.
- W2730672501 title "The small-sized ultraprecision sensor for measuring linear displacements" @default.
- W2730672501 doi "https://doi.org/10.1117/12.2269712" @default.
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