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• W273274680 abstract "Sputtering of boron nitride with xenon ions was investigated using secondary ion (SIMS) and secondary neutral (SNMS) mass spectrometry. The ions generated from the ion gun were incident on the target at an angle of 50' with respect to the surface'normal. The energy of ions ranged from 100 eV to 3 keV. A flood electron gun was used to neutralize the positive charge build-up on the target surface. The intensities of sputtered neutral and charged particles, including single atoms, molecules, and clusters, were measured as a function of ion energy. Positive SIMS spectra were dominated by the two boron isotopes whereas BN- and B- were the two major constituents of the negative SIMS spectra. Nitrogen could be detected only in the SNMS spectra. The intensity-energy curves of the sputtered particles were similar in shape. The knees in P-SIMS and SNMS intensity-energy curves appear at around I keV which is significantly higher that 100 to 200 eV energy range at which knees appear in the sputtering of medium and heavy elements by ions of argon and xenon. This difference in the position of the sputter yield knee between boron nitride and heavier targets is due to the reduced ion energy differences. The isotopic composition of secondary ions of boron were measured by bombarding boron nitride with xenon ions at energies ranging from 100 eV to 1.5 keV using a quadrupole mass spectrometer. An ion gun was used to generate the ion beam. A flood electron gun was used to neutralize the positive charge buildup on the target surface. The secondary ion flux was found to be enriched in heavy isotopes at lower incident ion energies. The heavy isotope enrichment was observed to decrease with increasing primary ion energy. Beyond 350 eV, light isotopes were sputtered preferentially with the enrichment increasing to an asymptotic value of 1.27 at 1.5 keV. The trend is similar to that of the isotopic enrichment observed earlier when copper was sputtered with xenon ions in the same energy range." @default.
• W273274680 created "2016-06-24" @default.
• W273274680 creator A5087353558 @default.
• W273274680 creator A5088313935 @default.
• W273274680 date "1999-01-01" @default.
• W273274680 modified "2023-09-27" @default.
• W273274680 title "Low-Energy Sputtering Studies of Boron Nitride with Xenon Ions" @default.
• W273274680 cites W1547429006 @default.
• W273274680 cites W1587831146 @default.
• W273274680 cites W1619357367 @default.
• W273274680 cites W1645340964 @default.
• W273274680 cites W1969112089 @default.
• W273274680 cites W1970203558 @default.
• W273274680 cites W1980015675 @default.
• W273274680 cites W1980412805 @default.
• W273274680 cites W1980442013 @default.
• W273274680 cites W1982448420 @default.
• W273274680 cites W1984287662 @default.
• W273274680 cites W1985790282 @default.
• W273274680 cites W1986499326 @default.
• W273274680 cites W1988224930 @default.
• W273274680 cites W1989185672 @default.
• W273274680 cites W1993932698 @default.
• W273274680 cites W1996840363 @default.
• W273274680 cites W2001618270 @default.
• W273274680 cites W2006080450 @default.
• W273274680 cites W2017765390 @default.
• W273274680 cites W2019465226 @default.
• W273274680 cites W2019573374 @default.
• W273274680 cites W2019802993 @default.
• W273274680 cites W2027054197 @default.
• W273274680 cites W2030486525 @default.
• W273274680 cites W2033248441 @default.
• W273274680 cites W2037494479 @default.
• W273274680 cites W2041003849 @default.
• W273274680 cites W2043621706 @default.
• W273274680 cites W2045866383 @default.
• W273274680 cites W2046953376 @default.
• W273274680 cites W2046974504 @default.
• W273274680 cites W2047067555 @default.
• W273274680 cites W2052241831 @default.
• W273274680 cites W2059534671 @default.
• W273274680 cites W2061279120 @default.
• W273274680 cites W2062436415 @default.
• W273274680 cites W2065046043 @default.
• W273274680 cites W2065636295 @default.
• W273274680 cites W2065783782 @default.
• W273274680 cites W2071855958 @default.
• W273274680 cites W2075582599 @default.
• W273274680 cites W2075881383 @default.
• W273274680 cites W2076466111 @default.
• W273274680 cites W2083548717 @default.
• W273274680 cites W2085970551 @default.
• W273274680 cites W2088083414 @default.
• W273274680 cites W2137250615 @default.
• W273274680 cites W2157057249 @default.
• W273274680 cites W2158399643 @default.
• W273274680 cites W2312198072 @default.
• W273274680 cites W2329614124 @default.
• W273274680 cites W2495064464 @default.
• W273274680 cites W274838717 @default.
• W273274680 hasPublicationYear "1999" @default.
• W273274680 type Work @default.
• W273274680 sameAs 273274680 @default.
• W273274680 citedByCount "0" @default.
• W273274680 crossrefType "journal-article" @default.
• W273274680 hasAuthorship W273274680A5087353558 @default.
• W273274680 hasAuthorship W273274680A5088313935 @default.
• W273274680 hasConcept C113196181 @default.
• W273274680 hasConcept C121332964 @default.
• W273274680 hasConcept C145148216 @default.
• W273274680 hasConcept C171250308 @default.
• W273274680 hasConcept C178790620 @default.
• W273274680 hasConcept C184779094 @default.
• W273274680 hasConcept C185592680 @default.
• W273274680 hasConcept C19067145 @default.
• W273274680 hasConcept C192562407 @default.
• W273274680 hasConcept C22423302 @default.
• W273274680 hasConcept C2780243435 @default.
• W273274680 hasConcept C43617362 @default.
• W273274680 hasConcept C547737533 @default.
• W273274680 hasConcept C548442186 @default.
• W273274680 hasConcept C77671233 @default.
• W273274680 hasConceptScore W273274680C113196181 @default.
• W273274680 hasConceptScore W273274680C121332964 @default.
• W273274680 hasConceptScore W273274680C145148216 @default.
• W273274680 hasConceptScore W273274680C171250308 @default.
• W273274680 hasConceptScore W273274680C178790620 @default.
• W273274680 hasConceptScore W273274680C184779094 @default.
• W273274680 hasConceptScore W273274680C185592680 @default.
• W273274680 hasConceptScore W273274680C19067145 @default.
• W273274680 hasConceptScore W273274680C192562407 @default.
• W273274680 hasConceptScore W273274680C22423302 @default.
• W273274680 hasConceptScore W273274680C2780243435 @default.
• W273274680 hasConceptScore W273274680C43617362 @default.
• W273274680 hasConceptScore W273274680C547737533 @default.
• W273274680 hasConceptScore W273274680C548442186 @default.
• W273274680 hasConceptScore W273274680C77671233 @default.
• W273274680 hasLocation W2732746801 @default.
• W273274680 hasOpenAccess W273274680 @default.

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