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• W2734003423 abstract "Periodic nanostructures have attracted considerable interest and been applied in many fields. However, nanostructures of sufficiently large areas and depths are necessary for the development of practical devices. In this study, large-area high-aspect-ratio periodic nanostructures were fabricated by using a hybrid technology based on X-ray interference lithography, and then the patterns were transferred onto various substrates successfully. The final periodic nanostructures on the substrate attained measurements up to square centimetres with depths greater than 200 nm." @default.
• W2734003423 created "2017-07-14" @default.
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• W2734003423 date "2017-12-01" @default.
• W2734003423 modified "2023-10-16" @default.
• W2734003423 title "Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography" @default.
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• W2734003423 doi "https://doi.org/10.1016/j.apsusc.2017.07.010" @default.
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