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• W2734691826 endingPage "095015" @default.
• W2734691826 startingPage "095015" @default.
• W2734691826 abstract "The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained." @default.
• W2734691826 created "2017-07-21" @default.
• W2734691826 creator A5029399403 @default.
• W2734691826 creator A5033345953 @default.
• W2734691826 creator A5069406381 @default.
• W2734691826 creator A5074799712 @default.
• W2734691826 creator A5086457005 @default.
• W2734691826 date "2017-08-22" @default.
• W2734691826 modified "2023-10-14" @default.
• W2734691826 title "Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling" @default.
• W2734691826 cites W1965307239 @default.
• W2734691826 cites W1967573642 @default.
• W2734691826 cites W1976970273 @default.
• W2734691826 cites W1981886735 @default.
• W2734691826 cites W1991859775 @default.
• W2734691826 cites W1993894412 @default.
• W2734691826 cites W1997441138 @default.
• W2734691826 cites W2002335608 @default.
• W2734691826 cites W2004272367 @default.
• W2734691826 cites W2005340413 @default.
• W2734691826 cites W2017763992 @default.
• W2734691826 cites W2019247142 @default.
• W2734691826 cites W2035126090 @default.
• W2734691826 cites W2037005427 @default.
• W2734691826 cites W2040817583 @default.
• W2734691826 cites W2046758551 @default.
• W2734691826 cites W2054372407 @default.
• W2734691826 cites W2059815493 @default.
• W2734691826 cites W2065885380 @default.
• W2734691826 cites W2073121784 @default.
• W2734691826 cites W2074806534 @default.
• W2734691826 cites W2087933332 @default.
• W2734691826 cites W2089709553 @default.
• W2734691826 cites W2092188263 @default.
• W2734691826 cites W2094948497 @default.
• W2734691826 cites W2126509923 @default.
• W2734691826 cites W2134864277 @default.
• W2734691826 cites W2135580922 @default.
• W2734691826 cites W2145431197 @default.
• W2734691826 cites W2145701546 @default.
• W2734691826 cites W2154428279 @default.
• W2734691826 cites W2235679284 @default.
• W2734691826 cites W2291938514 @default.
• W2734691826 cites W2312930478 @default.
• W2734691826 cites W2319826792 @default.
• W2734691826 cites W2558632283 @default.
• W2734691826 cites W2621919695 @default.
• W2734691826 cites W3106445612 @default.
• W2734691826 doi "https://doi.org/10.1088/1361-6439/aa7ebb" @default.
• W2734691826 hasPublicationYear "2017" @default.
• W2734691826 type Work @default.
• W2734691826 sameAs 2734691826 @default.
• W2734691826 citedByCount "9" @default.
• W2734691826 countsByYear W27346918262018 @default.
• W2734691826 countsByYear W27346918262019 @default.
• W2734691826 countsByYear W27346918262020 @default.
• W2734691826 countsByYear W27346918262022 @default.
• W2734691826 crossrefType "journal-article" @default.
• W2734691826 hasAuthorship W2734691826A5029399403 @default.
• W2734691826 hasAuthorship W2734691826A5033345953 @default.
• W2734691826 hasAuthorship W2734691826A5069406381 @default.
• W2734691826 hasAuthorship W2734691826A5074799712 @default.
• W2734691826 hasAuthorship W2734691826A5086457005 @default.
• W2734691826 hasBestOaLocation W27346918262 @default.
• W2734691826 hasConcept C112950240 @default.
• W2734691826 hasConcept C136525101 @default.
• W2734691826 hasConcept C142724271 @default.
• W2734691826 hasConcept C159985019 @default.
• W2734691826 hasConcept C160671074 @default.
• W2734691826 hasConcept C171250308 @default.
• W2734691826 hasConcept C192562407 @default.
• W2734691826 hasConcept C204787440 @default.
• W2734691826 hasConcept C2779698641 @default.
• W2734691826 hasConcept C37977207 @default.
• W2734691826 hasConcept C49040817 @default.
• W2734691826 hasConcept C544956773 @default.
• W2734691826 hasConcept C71924100 @default.
• W2734691826 hasConcept C85476182 @default.
• W2734691826 hasConcept C97126364 @default.
• W2734691826 hasConceptScore W2734691826C112950240 @default.
• W2734691826 hasConceptScore W2734691826C136525101 @default.
• W2734691826 hasConceptScore W2734691826C142724271 @default.
• W2734691826 hasConceptScore W2734691826C159985019 @default.
• W2734691826 hasConceptScore W2734691826C160671074 @default.
• W2734691826 hasConceptScore W2734691826C171250308 @default.
• W2734691826 hasConceptScore W2734691826C192562407 @default.
• W2734691826 hasConceptScore W2734691826C204787440 @default.
• W2734691826 hasConceptScore W2734691826C2779698641 @default.
• W2734691826 hasConceptScore W2734691826C37977207 @default.
• W2734691826 hasConceptScore W2734691826C49040817 @default.
• W2734691826 hasConceptScore W2734691826C544956773 @default.
• W2734691826 hasConceptScore W2734691826C71924100 @default.
• W2734691826 hasConceptScore W2734691826C85476182 @default.
• W2734691826 hasConceptScore W2734691826C97126364 @default.
• W2734691826 hasFunder F4320321709 @default.
• W2734691826 hasIssue "9" @default.
• W2734691826 hasLocation W27346918261 @default.
• W2734691826 hasLocation W27346918262 @default.

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