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- W2736304888 abstract "A novel hydrazine vaporization source has been developed in response to the emerging need for sub-400°C metal nitride deposition. Hydrazine has been demonstrated to be a viable precursor to enable low temperature atomic layer deposition (ALD). Initial results indicate that purification leads to TiN <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</inf> films without added oxygen." @default.
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- W2736304888 date "2017-05-01" @default.
- W2736304888 modified "2023-09-25" @default.
- W2736304888 title "Enabling low temperature metal nitride ALD using ultra-high purity hydrazine: ET/ID: Enabling technologies and innovative devices" @default.
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- W2736304888 doi "https://doi.org/10.1109/asmc.2017.7969274" @default.
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