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• W2736930137 abstract "The accelerometer based on MEMS is the fast developing device which finds its application in MEMS. It finds its applications in different fields namely automobile, consumer electronics, aeronautical, biomedical and robotics applications. In all these applications the device works based on the principle that the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams. The review article provides a past, present and future scope of the capacitive accelerometers in various fields." @default.
• W2736930137 created "2017-07-31" @default.
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• W2736930137 date "2016-12-01" @default.
• W2736930137 modified "2023-09-27" @default.
• W2736930137 title "Capacitive accelerometers for microelectromechanical applications: A review" @default.
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• W2736930137 doi "https://doi.org/10.1109/iccicct.2016.7987999" @default.
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