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- W2737501397 abstract "This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling." @default.
- W2737501397 created "2017-07-31" @default.
- W2737501397 creator A5033957295 @default.
- W2737501397 creator A5044810941 @default.
- W2737501397 creator A5051783142 @default.
- W2737501397 creator A5084728378 @default.
- W2737501397 creator A5007094172 @default.
- W2737501397 creator A5082646878 @default.
- W2737501397 date "2017-05-01" @default.
- W2737501397 modified "2023-09-24" @default.
- W2737501397 title "Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators" @default.
- W2737501397 cites W1978564507 @default.
- W2737501397 cites W2001378797 @default.
- W2737501397 cites W2003497722 @default.
- W2737501397 cites W2033716818 @default.
- W2737501397 cites W2051478389 @default.
- W2737501397 cites W2102581464 @default.
- W2737501397 cites W2170552430 @default.
- W2737501397 doi "https://doi.org/10.1109/dtip.2017.7984455" @default.
- W2737501397 hasPublicationYear "2017" @default.
- W2737501397 type Work @default.
- W2737501397 sameAs 2737501397 @default.
- W2737501397 citedByCount "3" @default.
- W2737501397 countsByYear W27375013972018 @default.
- W2737501397 countsByYear W27375013972019 @default.
- W2737501397 countsByYear W27375013972021 @default.
- W2737501397 crossrefType "proceedings-article" @default.
- W2737501397 hasAuthorship W2737501397A5007094172 @default.
- W2737501397 hasAuthorship W2737501397A5033957295 @default.
- W2737501397 hasAuthorship W2737501397A5044810941 @default.
- W2737501397 hasAuthorship W2737501397A5051783142 @default.
- W2737501397 hasAuthorship W2737501397A5082646878 @default.
- W2737501397 hasAuthorship W2737501397A5084728378 @default.
- W2737501397 hasConcept C119599485 @default.
- W2737501397 hasConcept C121332964 @default.
- W2737501397 hasConcept C127413603 @default.
- W2737501397 hasConcept C136525101 @default.
- W2737501397 hasConcept C142724271 @default.
- W2737501397 hasConcept C155840801 @default.
- W2737501397 hasConcept C172707124 @default.
- W2737501397 hasConcept C17525397 @default.
- W2737501397 hasConcept C192562407 @default.
- W2737501397 hasConcept C204787440 @default.
- W2737501397 hasConcept C30066665 @default.
- W2737501397 hasConcept C49040817 @default.
- W2737501397 hasConcept C62520636 @default.
- W2737501397 hasConcept C71924100 @default.
- W2737501397 hasConceptScore W2737501397C119599485 @default.
- W2737501397 hasConceptScore W2737501397C121332964 @default.
- W2737501397 hasConceptScore W2737501397C127413603 @default.
- W2737501397 hasConceptScore W2737501397C136525101 @default.
- W2737501397 hasConceptScore W2737501397C142724271 @default.
- W2737501397 hasConceptScore W2737501397C155840801 @default.
- W2737501397 hasConceptScore W2737501397C172707124 @default.
- W2737501397 hasConceptScore W2737501397C17525397 @default.
- W2737501397 hasConceptScore W2737501397C192562407 @default.
- W2737501397 hasConceptScore W2737501397C204787440 @default.
- W2737501397 hasConceptScore W2737501397C30066665 @default.
- W2737501397 hasConceptScore W2737501397C49040817 @default.
- W2737501397 hasConceptScore W2737501397C62520636 @default.
- W2737501397 hasConceptScore W2737501397C71924100 @default.
- W2737501397 hasLocation W27375013971 @default.
- W2737501397 hasOpenAccess W2737501397 @default.
- W2737501397 hasPrimaryLocation W27375013971 @default.
- W2737501397 hasRelatedWork W2011137092 @default.
- W2737501397 hasRelatedWork W2071016461 @default.
- W2737501397 hasRelatedWork W2091152586 @default.
- W2737501397 hasRelatedWork W2096981997 @default.
- W2737501397 hasRelatedWork W2151046565 @default.
- W2737501397 hasRelatedWork W2394126824 @default.
- W2737501397 hasRelatedWork W2443015857 @default.
- W2737501397 hasRelatedWork W2546897006 @default.
- W2737501397 hasRelatedWork W2899084033 @default.
- W2737501397 hasRelatedWork W4249160945 @default.
- W2737501397 isParatext "false" @default.
- W2737501397 isRetracted "false" @default.
- W2737501397 magId "2737501397" @default.
- W2737501397 workType "article" @default.