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- W2740049630 abstract "Precision control and manipulation of devices and materials at nanoscale is known as nanopositioning, a key requirement of nanotechnology. Nanopositioners are precise mechatronics systems designed not only to move or position a sample at some desired position with nanometre accuracy and repeatability but also to resolve adjacent positions of sample that are separated by less than a nanometre. High precision, large travel range with very high resolution, fast response with no or very little overshoot and high bandwidth are desired characteristics of nanopositioners. This paper presents the identification of nanopositioning device consisting of flexure stage for motion of sample and piezoelectric crystal as both sensor and actuator. Open loop behaviour of the nanopositioning device on the basis of time and frequency responses is plotted and analyzed. Nanoscale path planning and motion control of the sample are essential in nano manufacturing application such as micro-stereo-lithography (µSTL), dip pen nanolithography (DPN) and scanning application for imaging and manipulation of nanoscale surface phenomena. This paper aims at nanoscale path planning and motion control of sample. For this purpose, this paper describes the identification of motion trajectories commonly used in industrial application along with the challenges in optimal path planning to meet the nanoscale motion control objective and to achieve precise positioning and maximum throughput simultaneously. Proportional (P), proportional integral (PI) and proportional double integral (PII) controllers are simulated and implemented to obtain the accurate path tracking of the desired path. Then a comparative study of PI and PII controller on the basis of time response is given to show which controller is better. Simulation results for the performance analysis are carried out in MATLAB." @default.
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- W2740049630 date "2015-01-01" @default.
- W2740049630 modified "2023-09-22" @default.
- W2740049630 title "Tracking Control of Nanopositioning System Using Proportional and Double Integral Action" @default.
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