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• W2742283145 abstract "The concept of atomically controlled processing for group IV semiconductors is based on atomic-order surface reaction control. This approach is especially important for the epitaxial deposition of very thin (nm) layers. Here, the existences of Ge oxide in the CVD reactor resulting from former Ge deposition and hydrogen termination of the wafer surface is impacting the epitaxial growth essentially. Therefore the evaporation of Ge oxide is suppressed by Si coating the reactor before wafer loading and/or Si capping after Ge growth and/or very low temperature SiH4 treatment after wafer loading. By the use of Si0.5Ge0.5 buffer layer, hydrogen termination of the surface is reduced. As a result, nm-order thick Ge epitaxial growth with very short incubation period and the suppression of surface roughness generation is realized." @default.
• W2742283145 created "2017-08-17" @default.
• W2742283145 creator A5006538977 @default.
• W2742283145 creator A5050889627 @default.
• W2742283145 creator A5057363218 @default.
• W2742283145 creator A5061964161 @default.
• W2742283145 creator A5078543943 @default.
• W2742283145 creator A5080594555 @default.
• W2742283145 creator A5010213443 @default.
• W2742283145 date "2016-10-01" @default.
• W2742283145 modified "2023-09-30" @default.
• W2742283145 title "Atomically controlled processing for Ge CVD epitaxial growth" @default.
• W2742283145 cites W1553662814 @default.
• W2742283145 cites W1597398379 @default.
• W2742283145 cites W2561280327 @default.
• W2742283145 doi "https://doi.org/10.1109/icsict.2016.7998908" @default.
• W2742283145 hasPublicationYear "2016" @default.
• W2742283145 type Work @default.
• W2742283145 sameAs 2742283145 @default.
• W2742283145 citedByCount "0" @default.
• W2742283145 crossrefType "proceedings-article" @default.
• W2742283145 hasAuthorship W2742283145A5006538977 @default.
• W2742283145 hasAuthorship W2742283145A5010213443 @default.
• W2742283145 hasAuthorship W2742283145A5050889627 @default.
• W2742283145 hasAuthorship W2742283145A5057363218 @default.
• W2742283145 hasAuthorship W2742283145A5061964161 @default.
• W2742283145 hasAuthorship W2742283145A5078543943 @default.
• W2742283145 hasAuthorship W2742283145A5080594555 @default.
• W2742283145 hasConcept C107365816 @default.
• W2742283145 hasConcept C110738630 @default.
• W2742283145 hasConcept C121332964 @default.
• W2742283145 hasConcept C127413603 @default.
• W2742283145 hasConcept C151730666 @default.
• W2742283145 hasConcept C159985019 @default.
• W2742283145 hasConcept C160671074 @default.
• W2742283145 hasConcept C171250308 @default.
• W2742283145 hasConcept C178790620 @default.
• W2742283145 hasConcept C185592680 @default.
• W2742283145 hasConcept C191897082 @default.
• W2742283145 hasConcept C192562407 @default.
• W2742283145 hasConcept C2779227376 @default.
• W2742283145 hasConcept C2779851234 @default.
• W2742283145 hasConcept C2816523 @default.
• W2742283145 hasConcept C42360764 @default.
• W2742283145 hasConcept C49040817 @default.
• W2742283145 hasConcept C512968161 @default.
• W2742283145 hasConcept C544956773 @default.
• W2742283145 hasConcept C550623735 @default.
• W2742283145 hasConcept C57410435 @default.
• W2742283145 hasConcept C61441594 @default.
• W2742283145 hasConcept C64297162 @default.
• W2742283145 hasConcept C86803240 @default.
• W2742283145 hasConcept C97355855 @default.
• W2742283145 hasConceptScore W2742283145C107365816 @default.
• W2742283145 hasConceptScore W2742283145C110738630 @default.
• W2742283145 hasConceptScore W2742283145C121332964 @default.
• W2742283145 hasConceptScore W2742283145C127413603 @default.
• W2742283145 hasConceptScore W2742283145C151730666 @default.
• W2742283145 hasConceptScore W2742283145C159985019 @default.
• W2742283145 hasConceptScore W2742283145C160671074 @default.
• W2742283145 hasConceptScore W2742283145C171250308 @default.
• W2742283145 hasConceptScore W2742283145C178790620 @default.
• W2742283145 hasConceptScore W2742283145C185592680 @default.
• W2742283145 hasConceptScore W2742283145C191897082 @default.
• W2742283145 hasConceptScore W2742283145C192562407 @default.
• W2742283145 hasConceptScore W2742283145C2779227376 @default.
• W2742283145 hasConceptScore W2742283145C2779851234 @default.
• W2742283145 hasConceptScore W2742283145C2816523 @default.
• W2742283145 hasConceptScore W2742283145C42360764 @default.
• W2742283145 hasConceptScore W2742283145C49040817 @default.
• W2742283145 hasConceptScore W2742283145C512968161 @default.
• W2742283145 hasConceptScore W2742283145C544956773 @default.
• W2742283145 hasConceptScore W2742283145C550623735 @default.
• W2742283145 hasConceptScore W2742283145C57410435 @default.
• W2742283145 hasConceptScore W2742283145C61441594 @default.
• W2742283145 hasConceptScore W2742283145C64297162 @default.
• W2742283145 hasConceptScore W2742283145C86803240 @default.
• W2742283145 hasConceptScore W2742283145C97355855 @default.
• W2742283145 hasLocation W27422831451 @default.
• W2742283145 hasOpenAccess W2742283145 @default.
• W2742283145 hasPrimaryLocation W27422831451 @default.
• W2742283145 hasRelatedWork W1994239062 @default.
• W2742283145 hasRelatedWork W1997600436 @default.
• W2742283145 hasRelatedWork W2017283833 @default.
• W2742283145 hasRelatedWork W2039583404 @default.
• W2742283145 hasRelatedWork W2064722428 @default.
• W2742283145 hasRelatedWork W2066112946 @default.
• W2742283145 hasRelatedWork W2080735378 @default.
• W2742283145 hasRelatedWork W2083725571 @default.
• W2742283145 hasRelatedWork W2126281855 @default.
• W2742283145 hasRelatedWork W2318736477 @default.
• W2742283145 hasRelatedWork W2322463156 @default.
• W2742283145 hasRelatedWork W2365177872 @default.
• W2742283145 hasRelatedWork W2401493892 @default.
• W2742283145 hasRelatedWork W2565264638 @default.
• W2742283145 hasRelatedWork W801613343 @default.
• W2742283145 hasRelatedWork W1706835234 @default.
• W2742283145 hasRelatedWork W2835880597 @default.
• W2742283145 hasRelatedWork W2856502254 @default.
• W2742283145 hasRelatedWork W2873058781 @default.

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