Matches in SemOpenAlex for { <https://semopenalex.org/work/W2743072007> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2743072007 endingPage "256" @default.
- W2743072007 startingPage "255" @default.
- W2743072007 abstract "This paper describes a method for analyzing local stress in resonating single-crystal silicon (SCS) microstructures using micro Raman spectroscopy. The support beams of fan-shaped resonators with five different crystallographic orientations are used as specimens. The beam dimensions are same, which are 30μm long, 10μm wide and 5μm thick and it has a 4-μm-deep notch in its center. Raman spectra at the notch tips were measured during resonant vibrations. The observed spectra are broadened by stress oscillation. These spectra broadening are theoretically analyzed by time integration of no-stress spectra with stress distribution analysis using finite element method. The analyzed and measured spectra of the (100) Si specimens showed good agreement, which indicates the validity of this stress measurement method." @default.
- W2743072007 created "2017-08-17" @default.
- W2743072007 creator A5016741631 @default.
- W2743072007 creator A5064074469 @default.
- W2743072007 creator A5081234240 @default.
- W2743072007 creator A5088979644 @default.
- W2743072007 creator A5089712273 @default.
- W2743072007 creator A5045184002 @default.
- W2743072007 date "2010-01-01" @default.
- W2743072007 modified "2023-10-17" @default.
- W2743072007 title "T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy" @default.
- W2743072007 doi "https://doi.org/10.1299/jsmemecjo.2010.8.0_255" @default.
- W2743072007 hasPublicationYear "2010" @default.
- W2743072007 type Work @default.
- W2743072007 sameAs 2743072007 @default.
- W2743072007 citedByCount "0" @default.
- W2743072007 crossrefType "journal-article" @default.
- W2743072007 hasAuthorship W2743072007A5016741631 @default.
- W2743072007 hasAuthorship W2743072007A5045184002 @default.
- W2743072007 hasAuthorship W2743072007A5064074469 @default.
- W2743072007 hasAuthorship W2743072007A5081234240 @default.
- W2743072007 hasAuthorship W2743072007A5088979644 @default.
- W2743072007 hasAuthorship W2743072007A5089712273 @default.
- W2743072007 hasConcept C113196181 @default.
- W2743072007 hasConcept C120665830 @default.
- W2743072007 hasConcept C121332964 @default.
- W2743072007 hasConcept C1276947 @default.
- W2743072007 hasConcept C138885662 @default.
- W2743072007 hasConcept C168834538 @default.
- W2743072007 hasConcept C185592680 @default.
- W2743072007 hasConcept C192562407 @default.
- W2743072007 hasConcept C199360897 @default.
- W2743072007 hasConcept C21036866 @default.
- W2743072007 hasConcept C2781285689 @default.
- W2743072007 hasConcept C32891209 @default.
- W2743072007 hasConcept C40003534 @default.
- W2743072007 hasConcept C41008148 @default.
- W2743072007 hasConcept C41895202 @default.
- W2743072007 hasConcept C41999313 @default.
- W2743072007 hasConcept C43617362 @default.
- W2743072007 hasConcept C46141821 @default.
- W2743072007 hasConcept C4839761 @default.
- W2743072007 hasConcept C49040817 @default.
- W2743072007 hasConcept C544956773 @default.
- W2743072007 hasConcept C62520636 @default.
- W2743072007 hasConcept C73922627 @default.
- W2743072007 hasConceptScore W2743072007C113196181 @default.
- W2743072007 hasConceptScore W2743072007C120665830 @default.
- W2743072007 hasConceptScore W2743072007C121332964 @default.
- W2743072007 hasConceptScore W2743072007C1276947 @default.
- W2743072007 hasConceptScore W2743072007C138885662 @default.
- W2743072007 hasConceptScore W2743072007C168834538 @default.
- W2743072007 hasConceptScore W2743072007C185592680 @default.
- W2743072007 hasConceptScore W2743072007C192562407 @default.
- W2743072007 hasConceptScore W2743072007C199360897 @default.
- W2743072007 hasConceptScore W2743072007C21036866 @default.
- W2743072007 hasConceptScore W2743072007C2781285689 @default.
- W2743072007 hasConceptScore W2743072007C32891209 @default.
- W2743072007 hasConceptScore W2743072007C40003534 @default.
- W2743072007 hasConceptScore W2743072007C41008148 @default.
- W2743072007 hasConceptScore W2743072007C41895202 @default.
- W2743072007 hasConceptScore W2743072007C41999313 @default.
- W2743072007 hasConceptScore W2743072007C43617362 @default.
- W2743072007 hasConceptScore W2743072007C46141821 @default.
- W2743072007 hasConceptScore W2743072007C4839761 @default.
- W2743072007 hasConceptScore W2743072007C49040817 @default.
- W2743072007 hasConceptScore W2743072007C544956773 @default.
- W2743072007 hasConceptScore W2743072007C62520636 @default.
- W2743072007 hasConceptScore W2743072007C73922627 @default.
- W2743072007 hasIssue "0" @default.
- W2743072007 hasLocation W27430720071 @default.
- W2743072007 hasOpenAccess W2743072007 @default.
- W2743072007 hasPrimaryLocation W27430720071 @default.
- W2743072007 hasRelatedWork W1981126100 @default.
- W2743072007 hasRelatedWork W1988707735 @default.
- W2743072007 hasRelatedWork W2017378790 @default.
- W2743072007 hasRelatedWork W2027455321 @default.
- W2743072007 hasRelatedWork W2036750009 @default.
- W2743072007 hasRelatedWork W2365582419 @default.
- W2743072007 hasRelatedWork W2379824149 @default.
- W2743072007 hasRelatedWork W3156280197 @default.
- W2743072007 hasRelatedWork W748859634 @default.
- W2743072007 hasRelatedWork W2519837723 @default.
- W2743072007 hasVolume "2010.8" @default.
- W2743072007 isParatext "false" @default.
- W2743072007 isRetracted "false" @default.
- W2743072007 magId "2743072007" @default.
- W2743072007 workType "article" @default.