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• W2743277724 abstract "This paper shows high-pressure anneal (HPA) as a performance booster for Si-passivated strained Ge (sGe) p-channel FinFET and gate-all-around (GAA) devices. Improved interface quality and hole mobility (∼600 cm2/Vs) are obtained on FinFET after HPA at 450°C. While V th is tuned by ∼400 mV using TiAl work function metal (WFM), HPA-induced increases in J g and NBTI are suppressed by barrier layer engineering under the TiAl. Finally, the optimized HPA is also shown to improve the electrostatics and overall performance of GAA devices, reaching SS lin of 65 mV/dec at L g =60 nm and a Q factor of 15 with low I off of ∼3×10−9 A/μm." @default.
• W2743277724 created "2017-08-17" @default.
• W2743277724 creator A5005695208 @default.
• W2743277724 creator A5006538977 @default.
• W2743277724 creator A5021458154 @default.
• W2743277724 creator A5041747457 @default.
• W2743277724 creator A5042834217 @default.
• W2743277724 creator A5046242688 @default.
• W2743277724 creator A5047576640 @default.
• W2743277724 creator A5049394620 @default.
• W2743277724 creator A5053724730 @default.
• W2743277724 creator A5060988237 @default.
• W2743277724 creator A5062224341 @default.
• W2743277724 creator A5075407624 @default.
• W2743277724 creator A5085687580 @default.
• W2743277724 creator A5087201919 @default.
• W2743277724 creator A5090266281 @default.
• W2743277724 creator A5091241432 @default.
• W2743277724 date "2017-06-01" @default.
• W2743277724 modified "2023-10-01" @default.
• W2743277724 title "Performance and electrostatic improvement by high-pressure anneal on Si-passivated strained Ge pFinFET and gate all around devices with superior NBTI reliability" @default.
• W2743277724 doi "https://doi.org/10.23919/vlsit.2017.7998169" @default.
• W2743277724 hasPublicationYear "2017" @default.
• W2743277724 type Work @default.
• W2743277724 sameAs 2743277724 @default.
• W2743277724 citedByCount "13" @default.
• W2743277724 countsByYear W27432777242017 @default.
• W2743277724 countsByYear W27432777242018 @default.
• W2743277724 countsByYear W27432777242019 @default.
• W2743277724 countsByYear W27432777242020 @default.
• W2743277724 countsByYear W27432777242021 @default.
• W2743277724 countsByYear W27432777242022 @default.
• W2743277724 countsByYear W27432777242023 @default.
• W2743277724 crossrefType "proceedings-article" @default.
• W2743277724 hasAuthorship W2743277724A5005695208 @default.
• W2743277724 hasAuthorship W2743277724A5006538977 @default.
• W2743277724 hasAuthorship W2743277724A5021458154 @default.
• W2743277724 hasAuthorship W2743277724A5041747457 @default.
• W2743277724 hasAuthorship W2743277724A5042834217 @default.
• W2743277724 hasAuthorship W2743277724A5046242688 @default.
• W2743277724 hasAuthorship W2743277724A5047576640 @default.
• W2743277724 hasAuthorship W2743277724A5049394620 @default.
• W2743277724 hasAuthorship W2743277724A5053724730 @default.
• W2743277724 hasAuthorship W2743277724A5060988237 @default.
• W2743277724 hasAuthorship W2743277724A5062224341 @default.
• W2743277724 hasAuthorship W2743277724A5075407624 @default.
• W2743277724 hasAuthorship W2743277724A5085687580 @default.
• W2743277724 hasAuthorship W2743277724A5087201919 @default.
• W2743277724 hasAuthorship W2743277724A5090266281 @default.
• W2743277724 hasAuthorship W2743277724A5091241432 @default.
• W2743277724 hasConcept C106782819 @default.
• W2743277724 hasConcept C115235246 @default.
• W2743277724 hasConcept C119599485 @default.
• W2743277724 hasConcept C121332964 @default.
• W2743277724 hasConcept C127413603 @default.
• W2743277724 hasConcept C146978453 @default.
• W2743277724 hasConcept C159985019 @default.
• W2743277724 hasConcept C163258240 @default.
• W2743277724 hasConcept C165801399 @default.
• W2743277724 hasConcept C171250308 @default.
• W2743277724 hasConcept C172385210 @default.
• W2743277724 hasConcept C192562407 @default.
• W2743277724 hasConcept C203165030 @default.
• W2743277724 hasConcept C2361726 @default.
• W2743277724 hasConcept C24326235 @default.
• W2743277724 hasConcept C27050352 @default.
• W2743277724 hasConcept C2777855556 @default.
• W2743277724 hasConcept C2778413303 @default.
• W2743277724 hasConcept C2779227376 @default.
• W2743277724 hasConcept C43214815 @default.
• W2743277724 hasConcept C49040817 @default.
• W2743277724 hasConcept C51140833 @default.
• W2743277724 hasConcept C62520636 @default.
• W2743277724 hasConceptScore W2743277724C106782819 @default.
• W2743277724 hasConceptScore W2743277724C115235246 @default.
• W2743277724 hasConceptScore W2743277724C119599485 @default.
• W2743277724 hasConceptScore W2743277724C121332964 @default.
• W2743277724 hasConceptScore W2743277724C127413603 @default.
• W2743277724 hasConceptScore W2743277724C146978453 @default.
• W2743277724 hasConceptScore W2743277724C159985019 @default.
• W2743277724 hasConceptScore W2743277724C163258240 @default.
• W2743277724 hasConceptScore W2743277724C165801399 @default.
• W2743277724 hasConceptScore W2743277724C171250308 @default.
• W2743277724 hasConceptScore W2743277724C172385210 @default.
• W2743277724 hasConceptScore W2743277724C192562407 @default.
• W2743277724 hasConceptScore W2743277724C203165030 @default.
• W2743277724 hasConceptScore W2743277724C2361726 @default.
• W2743277724 hasConceptScore W2743277724C24326235 @default.
• W2743277724 hasConceptScore W2743277724C27050352 @default.
• W2743277724 hasConceptScore W2743277724C2777855556 @default.
• W2743277724 hasConceptScore W2743277724C2778413303 @default.
• W2743277724 hasConceptScore W2743277724C2779227376 @default.
• W2743277724 hasConceptScore W2743277724C43214815 @default.
• W2743277724 hasConceptScore W2743277724C49040817 @default.
• W2743277724 hasConceptScore W2743277724C51140833 @default.
• W2743277724 hasConceptScore W2743277724C62520636 @default.
• W2743277724 hasLocation W27432777241 @default.
• W2743277724 hasOpenAccess W2743277724 @default.
• W2743277724 hasPrimaryLocation W27432777241 @default.
• W2743277724 hasRelatedWork W1978914583 @default.

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