Matches in SemOpenAlex for { <https://semopenalex.org/work/W2743309067> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2743309067 endingPage "97" @default.
- W2743309067 startingPage "93" @default.
- W2743309067 abstract "EUV lithography is a promising candidate for the manufacturing of semiconductor devices for the 7 nm node and beyond. The success of any lithography depends on the availability of a suitable resist with high resolution, sensitivity and low LWR. Though polymer type CAR (chemically amplified resist) is the current standard photoresist, entirely new resist platforms are required due to the performance targets of smaller process nodes. To meet this target, metal oxide photoresists have been designed and lithographic properties have been studied. In this paper, scum elimination studies with dissolution rate acceleration concepts and new metal core applications are described." @default.
- W2743309067 created "2017-08-17" @default.
- W2743309067 creator A5046420892 @default.
- W2743309067 creator A5053232971 @default.
- W2743309067 creator A5058224442 @default.
- W2743309067 creator A5065493202 @default.
- W2743309067 creator A5089623987 @default.
- W2743309067 creator A5091400637 @default.
- W2743309067 date "2017-01-01" @default.
- W2743309067 modified "2023-09-26" @default.
- W2743309067 title "Recent Progress in EUV Metal Oxide Photoresists" @default.
- W2743309067 cites W2087599743 @default.
- W2743309067 doi "https://doi.org/10.2494/photopolymer.30.93" @default.
- W2743309067 hasPublicationYear "2017" @default.
- W2743309067 type Work @default.
- W2743309067 sameAs 2743309067 @default.
- W2743309067 citedByCount "6" @default.
- W2743309067 countsByYear W27433090672018 @default.
- W2743309067 countsByYear W27433090672019 @default.
- W2743309067 countsByYear W27433090672022 @default.
- W2743309067 countsByYear W27433090672023 @default.
- W2743309067 crossrefType "journal-article" @default.
- W2743309067 hasAuthorship W2743309067A5046420892 @default.
- W2743309067 hasAuthorship W2743309067A5053232971 @default.
- W2743309067 hasAuthorship W2743309067A5058224442 @default.
- W2743309067 hasAuthorship W2743309067A5065493202 @default.
- W2743309067 hasAuthorship W2743309067A5089623987 @default.
- W2743309067 hasAuthorship W2743309067A5091400637 @default.
- W2743309067 hasBestOaLocation W27433090671 @default.
- W2743309067 hasConcept C105487726 @default.
- W2743309067 hasConcept C134406635 @default.
- W2743309067 hasConcept C162996421 @default.
- W2743309067 hasConcept C163581340 @default.
- W2743309067 hasConcept C171250308 @default.
- W2743309067 hasConcept C177409738 @default.
- W2743309067 hasConcept C191897082 @default.
- W2743309067 hasConcept C192562407 @default.
- W2743309067 hasConcept C200274948 @default.
- W2743309067 hasConcept C204223013 @default.
- W2743309067 hasConcept C2779227376 @default.
- W2743309067 hasConcept C2779851234 @default.
- W2743309067 hasConcept C41794268 @default.
- W2743309067 hasConcept C49040817 @default.
- W2743309067 hasConcept C53524968 @default.
- W2743309067 hasConceptScore W2743309067C105487726 @default.
- W2743309067 hasConceptScore W2743309067C134406635 @default.
- W2743309067 hasConceptScore W2743309067C162996421 @default.
- W2743309067 hasConceptScore W2743309067C163581340 @default.
- W2743309067 hasConceptScore W2743309067C171250308 @default.
- W2743309067 hasConceptScore W2743309067C177409738 @default.
- W2743309067 hasConceptScore W2743309067C191897082 @default.
- W2743309067 hasConceptScore W2743309067C192562407 @default.
- W2743309067 hasConceptScore W2743309067C200274948 @default.
- W2743309067 hasConceptScore W2743309067C204223013 @default.
- W2743309067 hasConceptScore W2743309067C2779227376 @default.
- W2743309067 hasConceptScore W2743309067C2779851234 @default.
- W2743309067 hasConceptScore W2743309067C41794268 @default.
- W2743309067 hasConceptScore W2743309067C49040817 @default.
- W2743309067 hasConceptScore W2743309067C53524968 @default.
- W2743309067 hasIssue "1" @default.
- W2743309067 hasLocation W27433090671 @default.
- W2743309067 hasOpenAccess W2743309067 @default.
- W2743309067 hasPrimaryLocation W27433090671 @default.
- W2743309067 hasRelatedWork W1451772226 @default.
- W2743309067 hasRelatedWork W1599891132 @default.
- W2743309067 hasRelatedWork W2022121633 @default.
- W2743309067 hasRelatedWork W2058483223 @default.
- W2743309067 hasRelatedWork W2546756142 @default.
- W2743309067 hasRelatedWork W2600223426 @default.
- W2743309067 hasRelatedWork W2743309067 @default.
- W2743309067 hasRelatedWork W2790813161 @default.
- W2743309067 hasRelatedWork W3113457878 @default.
- W2743309067 hasRelatedWork W3150098593 @default.
- W2743309067 hasVolume "30" @default.
- W2743309067 isParatext "false" @default.
- W2743309067 isRetracted "false" @default.
- W2743309067 magId "2743309067" @default.
- W2743309067 workType "article" @default.