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- W2743506532 abstract "This paper describes a novel evaluation method for in-plane Poisson's ratio of film materials. We have designed an on-chip bending test chip that can generate bending force to film specimen via torsion bars, when applying normal load to loading levers. Using surface micro machining technologies, the test chip has been fabricated from SOI wafer with 10μm devise layer thickness. Average value of in-plane Poisson's ratio was 0.063, which deviates only 2% from the ideal value of single crystal silicon. Therefore, this technique would be useful for Poisson's ratio evaluation of thin film materials." @default.
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- W2743506532 date "2007-01-01" @default.
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- W2743506532 title "2830 Evaluation of Poisson's Ration of Film Material by On-Chip Bending Method" @default.
- W2743506532 doi "https://doi.org/10.1299/jsmemecjo.2007.1.0_715" @default.
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