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- W2743683621 abstract "We have developed dry etching process of lithium niobate (LN) wafer using neutral loop discharge reactive ion etching (NLD-RIE) to fabricate both micro- and nano-channels for investigating proton diffusion enhancement in ferroelectric nanochannels. We have also developed low-temperature direct bonding process between LN wafers. Two-hundred parallel nanochannel array of 200-nm deep and wide and 400-μm long connected to two microchannels (width: 500 μm, depth: 5.9 μm) at the both ends were fabricated. We have succeeded in measuring the proton diffusion coefficient as high as 1.2×10−8 m2/s." @default.
- W2743683621 created "2017-08-17" @default.
- W2743683621 creator A5001107247 @default.
- W2743683621 creator A5022897413 @default.
- W2743683621 creator A5030802655 @default.
- W2743683621 creator A5033923183 @default.
- W2743683621 creator A5064074469 @default.
- W2743683621 creator A5070551831 @default.
- W2743683621 creator A5088979644 @default.
- W2743683621 creator A5090703370 @default.
- W2743683621 creator A5045184002 @default.
- W2743683621 date "2017-06-01" @default.
- W2743683621 modified "2023-10-01" @default.
- W2743683621 title "Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device" @default.
- W2743683621 cites W1968086112 @default.
- W2743683621 cites W2010599959 @default.
- W2743683621 cites W2058492794 @default.
- W2743683621 cites W2063023935 @default.
- W2743683621 cites W2074907248 @default.
- W2743683621 cites W2131031908 @default.
- W2743683621 cites W2134333322 @default.
- W2743683621 cites W4243210282 @default.
- W2743683621 doi "https://doi.org/10.1109/transducers.2017.7994281" @default.
- W2743683621 hasPublicationYear "2017" @default.
- W2743683621 type Work @default.
- W2743683621 sameAs 2743683621 @default.
- W2743683621 citedByCount "4" @default.
- W2743683621 countsByYear W27436836212019 @default.
- W2743683621 countsByYear W27436836212020 @default.
- W2743683621 countsByYear W27436836212021 @default.
- W2743683621 countsByYear W27436836212022 @default.
- W2743683621 crossrefType "proceedings-article" @default.
- W2743683621 hasAuthorship W2743683621A5001107247 @default.
- W2743683621 hasAuthorship W2743683621A5022897413 @default.
- W2743683621 hasAuthorship W2743683621A5030802655 @default.
- W2743683621 hasAuthorship W2743683621A5033923183 @default.
- W2743683621 hasAuthorship W2743683621A5045184002 @default.
- W2743683621 hasAuthorship W2743683621A5064074469 @default.
- W2743683621 hasAuthorship W2743683621A5070551831 @default.
- W2743683621 hasAuthorship W2743683621A5088979644 @default.
- W2743683621 hasAuthorship W2743683621A5090703370 @default.
- W2743683621 hasConcept C100460472 @default.
- W2743683621 hasConcept C119599485 @default.
- W2743683621 hasConcept C127162648 @default.
- W2743683621 hasConcept C127413603 @default.
- W2743683621 hasConcept C1291036 @default.
- W2743683621 hasConcept C134018914 @default.
- W2743683621 hasConcept C159985019 @default.
- W2743683621 hasConcept C160671074 @default.
- W2743683621 hasConcept C171250308 @default.
- W2743683621 hasConcept C192562407 @default.
- W2743683621 hasConcept C2777207636 @default.
- W2743683621 hasConcept C2778071519 @default.
- W2743683621 hasConcept C2778541603 @default.
- W2743683621 hasConcept C2779133538 @default.
- W2743683621 hasConcept C2779227376 @default.
- W2743683621 hasConcept C2780357685 @default.
- W2743683621 hasConcept C49040817 @default.
- W2743683621 hasConcept C71924100 @default.
- W2743683621 hasConceptScore W2743683621C100460472 @default.
- W2743683621 hasConceptScore W2743683621C119599485 @default.
- W2743683621 hasConceptScore W2743683621C127162648 @default.
- W2743683621 hasConceptScore W2743683621C127413603 @default.
- W2743683621 hasConceptScore W2743683621C1291036 @default.
- W2743683621 hasConceptScore W2743683621C134018914 @default.
- W2743683621 hasConceptScore W2743683621C159985019 @default.
- W2743683621 hasConceptScore W2743683621C160671074 @default.
- W2743683621 hasConceptScore W2743683621C171250308 @default.
- W2743683621 hasConceptScore W2743683621C192562407 @default.
- W2743683621 hasConceptScore W2743683621C2777207636 @default.
- W2743683621 hasConceptScore W2743683621C2778071519 @default.
- W2743683621 hasConceptScore W2743683621C2778541603 @default.
- W2743683621 hasConceptScore W2743683621C2779133538 @default.
- W2743683621 hasConceptScore W2743683621C2779227376 @default.
- W2743683621 hasConceptScore W2743683621C2780357685 @default.
- W2743683621 hasConceptScore W2743683621C49040817 @default.
- W2743683621 hasConceptScore W2743683621C71924100 @default.
- W2743683621 hasLocation W27436836211 @default.
- W2743683621 hasOpenAccess W2743683621 @default.
- W2743683621 hasPrimaryLocation W27436836211 @default.
- W2743683621 hasRelatedWork W139592794 @default.
- W2743683621 hasRelatedWork W1969952121 @default.
- W2743683621 hasRelatedWork W2122421290 @default.
- W2743683621 hasRelatedWork W2135748303 @default.
- W2743683621 hasRelatedWork W2153160607 @default.
- W2743683621 hasRelatedWork W2591757658 @default.
- W2743683621 hasRelatedWork W2743683621 @default.
- W2743683621 hasRelatedWork W2890382676 @default.
- W2743683621 hasRelatedWork W3136803312 @default.
- W2743683621 hasRelatedWork W2108480527 @default.
- W2743683621 isParatext "false" @default.
- W2743683621 isRetracted "false" @default.
- W2743683621 magId "2743683621" @default.
- W2743683621 workType "article" @default.