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- W2744019807 abstract "Increasing areal storage density requires more precise positioning of magnetic heads. Dual stage actuators with thin film lead zirconate titanate oxide (PZT) have been proposed for this purpose. Using thin film, instead of bulk PZT, is preferable to achieve broader bandwidth. PZT layers are thicker and electrode layers thinner for actuator application, so that the dry-etching process should have high rate and selectivity. Such a process has strong reactive nature and produces by-product which could affect the device reliability. We made small terrace structure, which sever the by-product on the wall, to improve the life in high temperature and humidity." @default.
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- W2744019807 date "2003-01-01" @default.
- W2744019807 modified "2023-09-26" @default.
- W2744019807 title "Migration test of thin film PZT actuator with terrace structure" @default.
- W2744019807 doi "https://doi.org/10.1299/jsmemecjo.2003.5.0_291" @default.
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