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• W2744042920 abstract "Further requirements for microelectrode devices used in in vivo neuronal recordings include i) the fine needle geometry, ii) miniaturization of the device substrate, and iii) the device flexibility. This paper reports a <; 10-μm-diameter three-dimensional (3D) needle-electrode assembled on a 10-μm-thick 1×2 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> flexible film. Herein, we developed a fabrication process, in which a vapor-liquid-solid (VLS) grown vertical Si-microneedle was assembled on a Si film which was released from the Si substrate with a flexible film of parylene. The fabricated device shows the neuronal recording capability, as demonstrated in the in vivo recording of action potentials (spikes) from a mouse's cortex." @default.
• W2744042920 created "2017-08-17" @default.
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• W2744042920 date "2017-06-01" @default.
• W2744042920 modified "2023-09-26" @default.
• W2744042920 title "In vivo neuronal recordings using three-dimensional microneedle-electrode assembled on flexible substrate" @default.
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• W2744042920 doi "https://doi.org/10.1109/transducers.2017.7994399" @default.
• W2744042920 hasPublicationYear "2017" @default.
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