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- W2744192795 abstract "We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated." @default.
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- W2744192795 date "2017-11-15" @default.
- W2744192795 modified "2023-09-23" @default.
- W2744192795 title "Optically 3-D $mu $ -Printed Ferrule-Top Polymer Suspended-Mirror Devices" @default.
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- W2744192795 doi "https://doi.org/10.1109/jsen.2017.2737551" @default.
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