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- W2744255539 abstract "Single-sided fabricated monolithic tri-axis piezoresistive high-shock accelerometers are reported in this paper. A single-cantilever structure and two dual-cantilever structures are designed and employed to detect the Z-axis and X-/Y-axis high-shock accelerations, respectively. Different longitudinal dimensions of the cantilevers can be achieved and well controlled with a (111) wafer single-sided process. The remained smooth backside facilitates simple post-packaging without chip bonding. The results of the high shock test show the sensitivity of X-/Y-axis and Z-axis is 0.80–0.85 μV/g and 1.36 μV/g, respectively. The proposed single-sided process is also promising to fabricate other complex structures with different longitudinal sizes." @default.
- W2744255539 created "2017-08-17" @default.
- W2744255539 creator A5001200111 @default.
- W2744255539 creator A5015354316 @default.
- W2744255539 creator A5016572507 @default.
- W2744255539 creator A5061829183 @default.
- W2744255539 creator A5090427423 @default.
- W2744255539 date "2017-06-01" @default.
- W2744255539 modified "2023-09-27" @default.
- W2744255539 title "Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers" @default.
- W2744255539 cites W2023695640 @default.
- W2744255539 cites W2024052693 @default.
- W2744255539 cites W2028042222 @default.
- W2744255539 cites W2042553348 @default.
- W2744255539 cites W2101079840 @default.
- W2744255539 doi "https://doi.org/10.1109/transducers.2017.7994236" @default.
- W2744255539 hasPublicationYear "2017" @default.
- W2744255539 type Work @default.
- W2744255539 sameAs 2744255539 @default.
- W2744255539 citedByCount "0" @default.
- W2744255539 crossrefType "proceedings-article" @default.
- W2744255539 hasAuthorship W2744255539A5001200111 @default.
- W2744255539 hasAuthorship W2744255539A5015354316 @default.
- W2744255539 hasAuthorship W2744255539A5016572507 @default.
- W2744255539 hasAuthorship W2744255539A5061829183 @default.
- W2744255539 hasAuthorship W2744255539A5090427423 @default.
- W2744255539 hasConcept C111919701 @default.
- W2744255539 hasConcept C126322002 @default.
- W2744255539 hasConcept C141354745 @default.
- W2744255539 hasConcept C159985019 @default.
- W2744255539 hasConcept C160671074 @default.
- W2744255539 hasConcept C192562407 @default.
- W2744255539 hasConcept C198490522 @default.
- W2744255539 hasConcept C2781300812 @default.
- W2744255539 hasConcept C41008148 @default.
- W2744255539 hasConcept C49040817 @default.
- W2744255539 hasConcept C71924100 @default.
- W2744255539 hasConcept C89805583 @default.
- W2744255539 hasConceptScore W2744255539C111919701 @default.
- W2744255539 hasConceptScore W2744255539C126322002 @default.
- W2744255539 hasConceptScore W2744255539C141354745 @default.
- W2744255539 hasConceptScore W2744255539C159985019 @default.
- W2744255539 hasConceptScore W2744255539C160671074 @default.
- W2744255539 hasConceptScore W2744255539C192562407 @default.
- W2744255539 hasConceptScore W2744255539C198490522 @default.
- W2744255539 hasConceptScore W2744255539C2781300812 @default.
- W2744255539 hasConceptScore W2744255539C41008148 @default.
- W2744255539 hasConceptScore W2744255539C49040817 @default.
- W2744255539 hasConceptScore W2744255539C71924100 @default.
- W2744255539 hasConceptScore W2744255539C89805583 @default.
- W2744255539 hasLocation W27442555391 @default.
- W2744255539 hasOpenAccess W2744255539 @default.
- W2744255539 hasPrimaryLocation W27442555391 @default.
- W2744255539 hasRelatedWork W1993655752 @default.
- W2744255539 hasRelatedWork W2071286792 @default.
- W2744255539 hasRelatedWork W2079745043 @default.
- W2744255539 hasRelatedWork W2087020924 @default.
- W2744255539 hasRelatedWork W2090950845 @default.
- W2744255539 hasRelatedWork W2096969623 @default.
- W2744255539 hasRelatedWork W2243094698 @default.
- W2744255539 hasRelatedWork W2751576181 @default.
- W2744255539 hasRelatedWork W2891101863 @default.
- W2744255539 hasRelatedWork W2936927634 @default.
- W2744255539 hasRelatedWork W2958026064 @default.
- W2744255539 hasRelatedWork W2972570642 @default.
- W2744255539 hasRelatedWork W3013652098 @default.
- W2744255539 hasRelatedWork W3015470757 @default.
- W2744255539 hasRelatedWork W3150445205 @default.
- W2744255539 hasRelatedWork W65851528 @default.
- W2744255539 hasRelatedWork W2404230850 @default.
- W2744255539 hasRelatedWork W2825394713 @default.
- W2744255539 hasRelatedWork W2861070489 @default.
- W2744255539 hasRelatedWork W2870568833 @default.
- W2744255539 isParatext "false" @default.
- W2744255539 isRetracted "false" @default.
- W2744255539 magId "2744255539" @default.
- W2744255539 workType "article" @default.