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- W2744304070 abstract "This paper presents a resource- and time-efficient reduced order modeling (ROM) approach, which allows selective component-wise generation of system-level models for MEMS with high structural complexity. The fluid simulation is realized for perforated regions by means of an automatically generated, physics based lumped-flow-resistance network model. The procedure and performance, in comparison to a conventional FEM approach, is demonstrated and verified on an accelerometer-type MEMS device, for which the simulation results are compared with analytical damping models and experimentally obtained data." @default.
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- W2744304070 date "2017-06-01" @default.
- W2744304070 modified "2023-09-23" @default.
- W2744304070 title "Efficient reduced order modeling of fluid solid interactions for structurally complex perforated MEMS" @default.
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- W2744304070 doi "https://doi.org/10.1109/transducers.2017.7994484" @default.
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