Matches in SemOpenAlex for { <https://semopenalex.org/work/W2744749428> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2744749428 endingPage "344" @default.
- W2744749428 startingPage "343" @default.
- W2744749428 abstract "Recently, the demand to the diffractive optical elements is increasing with the developments in the micro fabrication technology. In this research, we created the diffractive optical elements with the use of the direct laser lithography system that has the feature of high-resolution drawing, high-speed drawing, and a high accuracy positioning system. Although it is difficult to draw to a large-sized substrate with electron-beam lithography system, since the direct laser lithography system makes it possible, production of the large diffractive optical elements is expected. Furthermore. 2 levels phase-type diffraction optical elements were produced by wet etching processing to the substrate, and comparison of the diffraction efficiency of the amplitude-type diffractive optical element and the phase-type diffractive optical element was discussed." @default.
- W2744749428 created "2017-08-17" @default.
- W2744749428 creator A5010407525 @default.
- W2744749428 creator A5019929786 @default.
- W2744749428 creator A5073343940 @default.
- W2744749428 creator A5087053765 @default.
- W2744749428 date "2004-01-01" @default.
- W2744749428 modified "2023-10-17" @default.
- W2744749428 title "Large Diffractive Optical Element processed by a Direct Laser Lithography System" @default.
- W2744749428 doi "https://doi.org/10.1299/jsmemecjo.2004.4.0_343" @default.
- W2744749428 hasPublicationYear "2004" @default.
- W2744749428 type Work @default.
- W2744749428 sameAs 2744749428 @default.
- W2744749428 citedByCount "0" @default.
- W2744749428 crossrefType "journal-article" @default.
- W2744749428 hasAuthorship W2744749428A5010407525 @default.
- W2744749428 hasAuthorship W2744749428A5019929786 @default.
- W2744749428 hasAuthorship W2744749428A5073343940 @default.
- W2744749428 hasAuthorship W2744749428A5087053765 @default.
- W2744749428 hasConcept C100460472 @default.
- W2744749428 hasConcept C105487726 @default.
- W2744749428 hasConcept C111368507 @default.
- W2744749428 hasConcept C120665830 @default.
- W2744749428 hasConcept C121332964 @default.
- W2744749428 hasConcept C127313418 @default.
- W2744749428 hasConcept C136525101 @default.
- W2744749428 hasConcept C137905882 @default.
- W2744749428 hasConcept C142724271 @default.
- W2744749428 hasConcept C171250308 @default.
- W2744749428 hasConcept C18355248 @default.
- W2744749428 hasConcept C192562407 @default.
- W2744749428 hasConcept C200274948 @default.
- W2744749428 hasConcept C204223013 @default.
- W2744749428 hasConcept C204787440 @default.
- W2744749428 hasConcept C207114421 @default.
- W2744749428 hasConcept C2777289219 @default.
- W2744749428 hasConcept C2779227376 @default.
- W2744749428 hasConcept C49040817 @default.
- W2744749428 hasConcept C520434653 @default.
- W2744749428 hasConcept C53524968 @default.
- W2744749428 hasConcept C71924100 @default.
- W2744749428 hasConceptScore W2744749428C100460472 @default.
- W2744749428 hasConceptScore W2744749428C105487726 @default.
- W2744749428 hasConceptScore W2744749428C111368507 @default.
- W2744749428 hasConceptScore W2744749428C120665830 @default.
- W2744749428 hasConceptScore W2744749428C121332964 @default.
- W2744749428 hasConceptScore W2744749428C127313418 @default.
- W2744749428 hasConceptScore W2744749428C136525101 @default.
- W2744749428 hasConceptScore W2744749428C137905882 @default.
- W2744749428 hasConceptScore W2744749428C142724271 @default.
- W2744749428 hasConceptScore W2744749428C171250308 @default.
- W2744749428 hasConceptScore W2744749428C18355248 @default.
- W2744749428 hasConceptScore W2744749428C192562407 @default.
- W2744749428 hasConceptScore W2744749428C200274948 @default.
- W2744749428 hasConceptScore W2744749428C204223013 @default.
- W2744749428 hasConceptScore W2744749428C204787440 @default.
- W2744749428 hasConceptScore W2744749428C207114421 @default.
- W2744749428 hasConceptScore W2744749428C2777289219 @default.
- W2744749428 hasConceptScore W2744749428C2779227376 @default.
- W2744749428 hasConceptScore W2744749428C49040817 @default.
- W2744749428 hasConceptScore W2744749428C520434653 @default.
- W2744749428 hasConceptScore W2744749428C53524968 @default.
- W2744749428 hasConceptScore W2744749428C71924100 @default.
- W2744749428 hasIssue "0" @default.
- W2744749428 hasLocation W27447494281 @default.
- W2744749428 hasOpenAccess W2744749428 @default.
- W2744749428 hasPrimaryLocation W27447494281 @default.
- W2744749428 hasRelatedWork W1963653520 @default.
- W2744749428 hasRelatedWork W1973816007 @default.
- W2744749428 hasRelatedWork W2022772372 @default.
- W2744749428 hasRelatedWork W2056625231 @default.
- W2744749428 hasRelatedWork W2092404174 @default.
- W2744749428 hasRelatedWork W2093981898 @default.
- W2744749428 hasRelatedWork W2118034025 @default.
- W2744749428 hasRelatedWork W2127556448 @default.
- W2744749428 hasRelatedWork W3016625011 @default.
- W2744749428 hasRelatedWork W4233398522 @default.
- W2744749428 hasVolume "2004.4" @default.
- W2744749428 isParatext "false" @default.
- W2744749428 isRetracted "false" @default.
- W2744749428 magId "2744749428" @default.
- W2744749428 workType "article" @default.