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• W2745031534 abstract "This paper reports, for the first time, on-chip ovenization of an epitaxially encapsulated resonant accelerometer to improve the stability of scale factor and bias. A double-ended tuning fork (DETF) resonator that shares the anchor with the sensing resonators is used to measure the device temperature. The measured temperature is maintained at a fixed set point using an on-chip silicon heater defined in the encapsulation layer. Preliminary results show significant improvement beyond the device's intrinsic passive temperature compensation. Over the temperature range from -20°C to 80°C, the 0g bias error is reduced by a factor of three, and the scale factor stability is improved by over an order of magnitude." @default.
• W2745031534 created "2017-08-17" @default.
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• W2745031534 date "2017-06-01" @default.
• W2745031534 modified "2023-10-11" @default.
• W2745031534 title "Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven" @default.
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• W2745031534 doi "https://doi.org/10.1109/transducers.2017.7994119" @default.
• W2745031534 hasPublicationYear "2017" @default.
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