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• W2748386670 abstract "Although, varieties of micro- to nanoscale fabrication technologies have been invented and refined for silicon (Si) processing because Si is the basic material of integrated circuits, the layouts are based on layer-by-layer approaches, making it difficult to realize three-dimensional (3D) structures with complicated shapes normal to the planar surface (along the out-of-plane direction) of the wafers used. Here, a novel and direct Si-processing technology that enables to bend thin layers of Si surfaces into various 3D curved structures at the micrometer scale is introduced. This bending is achieved by porosifying a Si wafer surface using anodic oxidation and then performing conventional photolithography patterning and wet etching. The porosity gradient in the depth direction gives rise to a stress-internalized layer in which self-rolling action is induced via subsequent patterning and wet etching. A subsequent oxidation process further enhances the curvature deformation, leading to the formation of tubes, for example. The rolling directions can be controlled by 2D patterning of the porous Si layer, which is explained well from a structural dynamics perspective. This technology has a wide range of capabilities for realizing 3D structures on Si substrates, enabling new design possibilities for Si-based on-chip devices." @default.
• W2748386670 created "2017-08-31" @default.
• W2748386670 creator A5011069435 @default.
• W2748386670 creator A5013767312 @default.
• W2748386670 creator A5022015595 @default.
• W2748386670 creator A5024304487 @default.
• W2748386670 creator A5039575386 @default.
• W2748386670 creator A5059510448 @default.
• W2748386670 creator A5077182983 @default.
• W2748386670 creator A5087644218 @default.
• W2748386670 date "2017-08-14" @default.
• W2748386670 modified "2023-10-16" @default.
• W2748386670 title "Direct Microrolling Processing on a Silicon Wafer" @default.
• W2748386670 cites W1122812026 @default.
• W2748386670 cites W1902438929 @default.
• W2748386670 cites W1973809467 @default.
• W2748386670 cites W1983280120 @default.
• W2748386670 cites W2010678777 @default.
• W2748386670 cites W2030500790 @default.
• W2748386670 cites W2051475102 @default.
• W2748386670 cites W2058751044 @default.
• W2748386670 cites W2064227084 @default.
• W2748386670 cites W2065718794 @default.
• W2748386670 cites W2070524728 @default.
• W2748386670 cites W2082497302 @default.
• W2748386670 cites W2086104094 @default.
• W2748386670 cites W2086427104 @default.
• W2748386670 cites W2089123823 @default.
• W2748386670 cites W2107331541 @default.
• W2748386670 cites W2153327478 @default.
• W2748386670 cites W2165738484 @default.
• W2748386670 cites W2316694694 @default.
• W2748386670 cites W2316845837 @default.
• W2748386670 cites W2398701935 @default.
• W2748386670 cites W2516665690 @default.
• W2748386670 cites W2519197372 @default.
• W2748386670 doi "https://doi.org/10.1002/smll.201701630" @default.
• W2748386670 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28805041" @default.
• W2748386670 hasPublicationYear "2017" @default.
• W2748386670 type Work @default.
• W2748386670 sameAs 2748386670 @default.
• W2748386670 citedByCount "2" @default.
• W2748386670 countsByYear W27483866702018 @default.
• W2748386670 countsByYear W27483866702020 @default.
• W2748386670 crossrefType "journal-article" @default.
• W2748386670 hasAuthorship W2748386670A5011069435 @default.
• W2748386670 hasAuthorship W2748386670A5013767312 @default.
• W2748386670 hasAuthorship W2748386670A5022015595 @default.
• W2748386670 hasAuthorship W2748386670A5024304487 @default.
• W2748386670 hasAuthorship W2748386670A5039575386 @default.
• W2748386670 hasAuthorship W2748386670A5059510448 @default.
• W2748386670 hasAuthorship W2748386670A5077182983 @default.
• W2748386670 hasAuthorship W2748386670A5087644218 @default.
• W2748386670 hasConcept C100460472 @default.
• W2748386670 hasConcept C105487726 @default.
• W2748386670 hasConcept C120665830 @default.
• W2748386670 hasConcept C121332964 @default.
• W2748386670 hasConcept C121684516 @default.
• W2748386670 hasConcept C134786449 @default.
• W2748386670 hasConcept C136525101 @default.
• W2748386670 hasConcept C142724271 @default.
• W2748386670 hasConcept C160671074 @default.
• W2748386670 hasConcept C171250308 @default.
• W2748386670 hasConcept C171635847 @default.
• W2748386670 hasConcept C192562407 @default.
• W2748386670 hasConcept C204787440 @default.
• W2748386670 hasConcept C2779227376 @default.
• W2748386670 hasConcept C33220542 @default.
• W2748386670 hasConcept C41008148 @default.
• W2748386670 hasConcept C45206210 @default.
• W2748386670 hasConcept C49040817 @default.
• W2748386670 hasConcept C544956773 @default.
• W2748386670 hasConcept C71924100 @default.
• W2748386670 hasConceptScore W2748386670C100460472 @default.
• W2748386670 hasConceptScore W2748386670C105487726 @default.
• W2748386670 hasConceptScore W2748386670C120665830 @default.
• W2748386670 hasConceptScore W2748386670C121332964 @default.
• W2748386670 hasConceptScore W2748386670C121684516 @default.
• W2748386670 hasConceptScore W2748386670C134786449 @default.
• W2748386670 hasConceptScore W2748386670C136525101 @default.
• W2748386670 hasConceptScore W2748386670C142724271 @default.
• W2748386670 hasConceptScore W2748386670C160671074 @default.
• W2748386670 hasConceptScore W2748386670C171250308 @default.
• W2748386670 hasConceptScore W2748386670C171635847 @default.
• W2748386670 hasConceptScore W2748386670C192562407 @default.
• W2748386670 hasConceptScore W2748386670C204787440 @default.
• W2748386670 hasConceptScore W2748386670C2779227376 @default.
• W2748386670 hasConceptScore W2748386670C33220542 @default.
• W2748386670 hasConceptScore W2748386670C41008148 @default.
• W2748386670 hasConceptScore W2748386670C45206210 @default.
• W2748386670 hasConceptScore W2748386670C49040817 @default.
• W2748386670 hasConceptScore W2748386670C544956773 @default.
• W2748386670 hasConceptScore W2748386670C71924100 @default.
• W2748386670 hasFunder F4320324067 @default.
• W2748386670 hasIssue "36" @default.
• W2748386670 hasLocation W27483866701 @default.
• W2748386670 hasLocation W27483866702 @default.
• W2748386670 hasOpenAccess W2748386670 @default.
• W2748386670 hasPrimaryLocation W27483866701 @default.
• W2748386670 hasRelatedWork W1966895858 @default.

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