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- W2748505674 endingPage "1999" @default.
- W2748505674 startingPage "1987" @default.
- W2748505674 abstract "The surface topographical analysis of SiO2 on si-rich and c-rich faces of 4H-SiC has been experimentally analyzed by conductive atomic force microscopy (C-AFM) and surface profiler. Wet thermal oxidation process has been performed in horizontal quartz furnace at 1110oC with the flow of molecular oxygen from 30 minutes to 180 minutes. Rate of oxidation on c-face has been found nearly 10 times faster than on si-face of 4H-SiC wafer. Stylus based surface profiler and Ellipsometer have been employed for oxidized surface roughness and oxide thickness measurements, respectively. We report that oxidized, c-face contained higher roughness and more atomic density than si-face. The bare surfaces of 4H-SiC faces contribute for the roughness in the respective thermally grown oxides. Si-face surface of 4H-SiC is smoother than c-face surface owing to its epitaxy nature. Atomic scale surface morphology of the oxide on si-face and c-face was captured by employing AFM in constant height mode. A number of samples have been oxidized for each experiment in order to generate statistical data." @default.
- W2748505674 created "2017-08-31" @default.
- W2748505674 creator A5024696696 @default.
- W2748505674 creator A5077598874 @default.
- W2748505674 creator A5088293162 @default.
- W2748505674 date "2009-01-01" @default.
- W2748505674 modified "2023-09-22" @default.
- W2748505674 title "Surface Topographical Analysis of Face Terminated Wet Thermal Oxidation of 4H-SiC Substrate" @default.
- W2748505674 hasPublicationYear "2009" @default.
- W2748505674 type Work @default.
- W2748505674 sameAs 2748505674 @default.
- W2748505674 citedByCount "1" @default.
- W2748505674 crossrefType "journal-article" @default.
- W2748505674 hasAuthorship W2748505674A5024696696 @default.
- W2748505674 hasAuthorship W2748505674A5077598874 @default.
- W2748505674 hasAuthorship W2748505674A5088293162 @default.
- W2748505674 hasConcept C107365816 @default.
- W2748505674 hasConcept C111368507 @default.
- W2748505674 hasConcept C111919701 @default.
- W2748505674 hasConcept C113196181 @default.
- W2748505674 hasConcept C127313418 @default.
- W2748505674 hasConcept C159985019 @default.
- W2748505674 hasConcept C160671074 @default.
- W2748505674 hasConcept C164086593 @default.
- W2748505674 hasConcept C185592680 @default.
- W2748505674 hasConcept C191897082 @default.
- W2748505674 hasConcept C192562407 @default.
- W2748505674 hasConcept C2777289219 @default.
- W2748505674 hasConcept C2779281663 @default.
- W2748505674 hasConcept C2779851234 @default.
- W2748505674 hasConcept C2779870107 @default.
- W2748505674 hasConcept C41008148 @default.
- W2748505674 hasConcept C43617362 @default.
- W2748505674 hasConcept C49040817 @default.
- W2748505674 hasConcept C71039073 @default.
- W2748505674 hasConceptScore W2748505674C107365816 @default.
- W2748505674 hasConceptScore W2748505674C111368507 @default.
- W2748505674 hasConceptScore W2748505674C111919701 @default.
- W2748505674 hasConceptScore W2748505674C113196181 @default.
- W2748505674 hasConceptScore W2748505674C127313418 @default.
- W2748505674 hasConceptScore W2748505674C159985019 @default.
- W2748505674 hasConceptScore W2748505674C160671074 @default.
- W2748505674 hasConceptScore W2748505674C164086593 @default.
- W2748505674 hasConceptScore W2748505674C185592680 @default.
- W2748505674 hasConceptScore W2748505674C191897082 @default.
- W2748505674 hasConceptScore W2748505674C192562407 @default.
- W2748505674 hasConceptScore W2748505674C2777289219 @default.
- W2748505674 hasConceptScore W2748505674C2779281663 @default.
- W2748505674 hasConceptScore W2748505674C2779851234 @default.
- W2748505674 hasConceptScore W2748505674C2779870107 @default.
- W2748505674 hasConceptScore W2748505674C41008148 @default.
- W2748505674 hasConceptScore W2748505674C43617362 @default.
- W2748505674 hasConceptScore W2748505674C49040817 @default.
- W2748505674 hasConceptScore W2748505674C71039073 @default.
- W2748505674 hasIssue "3" @default.
- W2748505674 hasLocation W27485056741 @default.
- W2748505674 hasOpenAccess W2748505674 @default.
- W2748505674 hasPrimaryLocation W27485056741 @default.
- W2748505674 hasRelatedWork W1968261747 @default.
- W2748505674 hasRelatedWork W1981702370 @default.
- W2748505674 hasRelatedWork W1991530956 @default.
- W2748505674 hasRelatedWork W1993364475 @default.
- W2748505674 hasRelatedWork W2008363638 @default.
- W2748505674 hasRelatedWork W2017341766 @default.
- W2748505674 hasRelatedWork W2069741884 @default.
- W2748505674 hasRelatedWork W2088773199 @default.
- W2748505674 hasRelatedWork W2090441145 @default.
- W2748505674 hasRelatedWork W2090668924 @default.
- W2748505674 hasRelatedWork W2094307010 @default.
- W2748505674 hasRelatedWork W2159243381 @default.
- W2748505674 hasRelatedWork W2164197408 @default.
- W2748505674 hasRelatedWork W2189538185 @default.
- W2748505674 hasRelatedWork W2303055449 @default.
- W2748505674 hasRelatedWork W2367533231 @default.
- W2748505674 hasRelatedWork W2593114204 @default.
- W2748505674 hasRelatedWork W2900847848 @default.
- W2748505674 hasRelatedWork W3103226648 @default.
- W2748505674 hasRelatedWork W2612192116 @default.
- W2748505674 hasVolume "7" @default.
- W2748505674 isParatext "false" @default.
- W2748505674 isRetracted "false" @default.
- W2748505674 magId "2748505674" @default.
- W2748505674 workType "article" @default.