Matches in SemOpenAlex for { <https://semopenalex.org/work/W2749278540> ?p ?o ?g. }
- W2749278540 endingPage "295" @default.
- W2749278540 startingPage "290" @default.
- W2749278540 abstract "Abstract Nanolaminates formed by several bilayers of Al2O3 and ZnO (AZA), grown by atomic layer deposition from Trimethyl aluminum, Diethyl zinc and water as co-reactants, were deposited on n-type (100) silicon substrates. A set of 5 nanolaminates with a total thickness of about 100 nm, containing several Al2O3/ZnO bilayers with thicknesses of 0.28, 0.38, 2, 10 and 20 nm, were prepared. XRD shows an evolution from amorphous to crystalline structure as a function of bilayer thickness. Capacitance-Voltage (C-V) and Current-Voltage (I-V) electrical characterization was carried out in order to evaluate the potential of the nanolaminates for microelectronic applications. Dielectric constant values between 8.3 and 9.6 were obtained, depending on bilayer thickness. The MOS capacitors exhibited net equivalent oxide thickness values between 44 and 38 nm." @default.
- W2749278540 created "2017-08-31" @default.
- W2749278540 creator A5022976340 @default.
- W2749278540 creator A5028263388 @default.
- W2749278540 creator A5029120248 @default.
- W2749278540 creator A5058690831 @default.
- W2749278540 creator A5063564478 @default.
- W2749278540 creator A5065919951 @default.
- W2749278540 creator A5068012608 @default.
- W2749278540 creator A5068019993 @default.
- W2749278540 creator A5068400755 @default.
- W2749278540 creator A5071082894 @default.
- W2749278540 creator A5078276341 @default.
- W2749278540 creator A5089629357 @default.
- W2749278540 date "2017-11-01" @default.
- W2749278540 modified "2023-10-14" @default.
- W2749278540 title "Structural and electrical characterization of multilayer Al2O3/ZnO nanolaminates grown by atomic layer deposition" @default.
- W2749278540 cites W1865285618 @default.
- W2749278540 cites W1966800404 @default.
- W2749278540 cites W1967048546 @default.
- W2749278540 cites W1975423126 @default.
- W2749278540 cites W1977333046 @default.
- W2749278540 cites W1987134634 @default.
- W2749278540 cites W1994776570 @default.
- W2749278540 cites W1995191254 @default.
- W2749278540 cites W2005435060 @default.
- W2749278540 cites W2016327204 @default.
- W2749278540 cites W2020354832 @default.
- W2749278540 cites W2023353733 @default.
- W2749278540 cites W2024025132 @default.
- W2749278540 cites W2032254394 @default.
- W2749278540 cites W2036124400 @default.
- W2749278540 cites W2037845847 @default.
- W2749278540 cites W2037845903 @default.
- W2749278540 cites W2039823614 @default.
- W2749278540 cites W2046435599 @default.
- W2749278540 cites W2047101395 @default.
- W2749278540 cites W2054986536 @default.
- W2749278540 cites W2057061144 @default.
- W2749278540 cites W2057611717 @default.
- W2749278540 cites W2073293057 @default.
- W2749278540 cites W2073765833 @default.
- W2749278540 cites W2080586870 @default.
- W2749278540 cites W2081122609 @default.
- W2749278540 cites W2085074279 @default.
- W2749278540 cites W2086933031 @default.
- W2749278540 cites W2087130128 @default.
- W2749278540 cites W2108105063 @default.
- W2749278540 cites W2116530746 @default.
- W2749278540 cites W2131958262 @default.
- W2749278540 cites W2136013851 @default.
- W2749278540 cites W2141086973 @default.
- W2749278540 cites W2145366579 @default.
- W2749278540 cites W2158453890 @default.
- W2749278540 cites W2166357587 @default.
- W2749278540 cites W2274229597 @default.
- W2749278540 cites W2287674617 @default.
- W2749278540 cites W2327038069 @default.
- W2749278540 cites W2333678145 @default.
- W2749278540 cites W2342490089 @default.
- W2749278540 cites W2430209003 @default.
- W2749278540 doi "https://doi.org/10.1016/j.mssp.2017.08.007" @default.
- W2749278540 hasPublicationYear "2017" @default.
- W2749278540 type Work @default.
- W2749278540 sameAs 2749278540 @default.
- W2749278540 citedByCount "13" @default.
- W2749278540 countsByYear W27492785402018 @default.
- W2749278540 countsByYear W27492785402019 @default.
- W2749278540 countsByYear W27492785402020 @default.
- W2749278540 countsByYear W27492785402021 @default.
- W2749278540 countsByYear W27492785402022 @default.
- W2749278540 countsByYear W27492785402023 @default.
- W2749278540 crossrefType "journal-article" @default.
- W2749278540 hasAuthorship W2749278540A5022976340 @default.
- W2749278540 hasAuthorship W2749278540A5028263388 @default.
- W2749278540 hasAuthorship W2749278540A5029120248 @default.
- W2749278540 hasAuthorship W2749278540A5058690831 @default.
- W2749278540 hasAuthorship W2749278540A5063564478 @default.
- W2749278540 hasAuthorship W2749278540A5065919951 @default.
- W2749278540 hasAuthorship W2749278540A5068012608 @default.
- W2749278540 hasAuthorship W2749278540A5068019993 @default.
- W2749278540 hasAuthorship W2749278540A5068400755 @default.
- W2749278540 hasAuthorship W2749278540A5071082894 @default.
- W2749278540 hasAuthorship W2749278540A5078276341 @default.
- W2749278540 hasAuthorship W2749278540A5089629357 @default.
- W2749278540 hasConcept C127413603 @default.
- W2749278540 hasConcept C151730666 @default.
- W2749278540 hasConcept C171250308 @default.
- W2749278540 hasConcept C192562407 @default.
- W2749278540 hasConcept C2779227376 @default.
- W2749278540 hasConcept C2780841128 @default.
- W2749278540 hasConcept C2816523 @default.
- W2749278540 hasConcept C42360764 @default.
- W2749278540 hasConcept C49040817 @default.
- W2749278540 hasConcept C64297162 @default.
- W2749278540 hasConcept C69544855 @default.
- W2749278540 hasConcept C86803240 @default.
- W2749278540 hasConceptScore W2749278540C127413603 @default.