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• W2750717498 abstract "In this work, a hydrogen capacitor nanosensor with palladium nanoparticles (PdNPs) electrode based on metal–oxide–semiconductor structure has been fabricated. The capacitor sensor has been fabricated on the n-type silicon substrate with an oxide film thickness of 50 nm. PdNPs are synthesised and then deposited on the oxide surface using spin coating. PdNPs are characterised using by transmission electron microscope and UV spectrum. Also, the morphology of the oxide surface is characterised using by atomic force microscope. The response time and recovery time of nanosensor have been explained at the room temperature. The time interval to 90% of the signal value for 1% H2–N2 mixture was 1.4 s and recovery time was 14 s. The curve of pressure as a function of hydrogen concentration (H/Pd) in the PdNPs and the mechanism of the nanosensor are reported. The capacitor nanosensor based on nanoparticles shows sensitive and fast response." @default.
• W2750717498 created "2017-09-15" @default.
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• W2750717498 creator A5072940637 @default.
• W2750717498 date "2018-02-01" @default.
• W2750717498 modified "2023-10-06" @default.
• W2750717498 title "Monitoring of hydrogen concentration using capacitive nanosensor in a 1% H ₂ –N ₂ mixture" @default.
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• W2750717498 doi "https://doi.org/10.1049/mnl.2017.0586" @default.
• W2750717498 hasPublicationYear "2018" @default.
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