FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2753574154> ?p ?o ?g. }

• W2753574154 abstract "Multiple sets of gold (Au) four-terminal microelectrodes comprising 100 μm-scale pad electrodes and 20 μm-wide lead lines were fabricated on a silicon substrate by a print-and-imprint method involving laser drilling and screen printing. Laser drilling of 12.5 μm-thick polyimide (PI) sheets with a picosecond-pulse laser enabled the fabrication of PI membranes with designed patterns of through holes. The through holes had a frustum shape, and the average hole diameters on both the laser entry and exit sides of the PI films enlarged with an increase in the applied repetition rate. The hole patterns designed with submicrometer position accuracy were prepared using a linear motor stage. Liquid ultraviolet (UV)-curable resin, exhibiting a high viscosity (11.0 Pa s) and a high dry-etching resistance to argon (Ar) ion beam milling after UV curing, was placed onto a substrate surface as droplets by screen printing, corresponding to the hole patterns of the PI through-hole masks. The average volume of the liquid droplets could be tuned in the range of 0.02–0.54 pl, which depended on the volumes of the laser-drilled frustum holes. The volumes of liquid resin necessary to fill the mold recesses were adjusted site-selectively by the number of resin droplets printed on a metal-deposited substrate surface. Fluorescence microscopy with a fluorescent dye-doped resin indicated that the imprinted resist patterns had a residual layer thickness in the range of 15–28 nm. The Au electrodes with a 30 nm-thickness could be fabricated by subsequent Ar ion beam milling and removal of a sacrificial metal layer." @default.
• W2753574154 created "2017-09-15" @default.
• W2753574154 creator A5005643174 @default.
• W2753574154 creator A5048967915 @default.
• W2753574154 creator A5053442214 @default.
• W2753574154 creator A5076328805 @default.
• W2753574154 date "2017-09-06" @default.
• W2753574154 modified "2023-10-18" @default.
• W2753574154 title "Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks" @default.
• W2753574154 cites W1971963330 @default.
• W2753574154 cites W1974190713 @default.
• W2753574154 cites W1993473017 @default.
• W2753574154 cites W1995443912 @default.
• W2753574154 cites W1997720331 @default.
• W2753574154 cites W2005479809 @default.
• W2753574154 cites W2012077127 @default.
• W2753574154 cites W2015519934 @default.
• W2753574154 cites W2025105510 @default.
• W2753574154 cites W2029422697 @default.
• W2753574154 cites W2037143164 @default.
• W2753574154 cites W2037370123 @default.
• W2753574154 cites W2044650778 @default.
• W2753574154 cites W2060354092 @default.
• W2753574154 cites W2073774756 @default.
• W2753574154 cites W2081198555 @default.
• W2753574154 cites W2087841797 @default.
• W2753574154 cites W2106499891 @default.
• W2753574154 cites W2138368127 @default.
• W2753574154 cites W2141199051 @default.
• W2753574154 cites W2168528216 @default.
• W2753574154 cites W2178392162 @default.
• W2753574154 cites W2316393780 @default.
• W2753574154 cites W2319463059 @default.
• W2753574154 cites W2327859527 @default.
• W2753574154 cites W2401411199 @default.
• W2753574154 cites W2405661135 @default.
• W2753574154 cites W2486106823 @default.
• W2753574154 cites W2525292331 @default.
• W2753574154 cites W4254330653 @default.
• W2753574154 doi "https://doi.org/10.1116/1.4991629" @default.
• W2753574154 hasPublicationYear "2017" @default.
• W2753574154 type Work @default.
• W2753574154 sameAs 2753574154 @default.
• W2753574154 citedByCount "8" @default.
• W2753574154 countsByYear W27535741542018 @default.
• W2753574154 countsByYear W27535741542019 @default.
• W2753574154 countsByYear W27535741542020 @default.
• W2753574154 countsByYear W27535741542022 @default.
• W2753574154 crossrefType "journal-article" @default.
• W2753574154 hasAuthorship W2753574154A5005643174 @default.
• W2753574154 hasAuthorship W2753574154A5048967915 @default.
• W2753574154 hasAuthorship W2753574154A5053442214 @default.
• W2753574154 hasAuthorship W2753574154A5076328805 @default.
• W2753574154 hasConcept C111368507 @default.
• W2753574154 hasConcept C111670793 @default.
• W2753574154 hasConcept C120665830 @default.
• W2753574154 hasConcept C121332964 @default.
• W2753574154 hasConcept C127313418 @default.
• W2753574154 hasConcept C136525101 @default.
• W2753574154 hasConcept C142724271 @default.
• W2753574154 hasConcept C147789679 @default.
• W2753574154 hasConcept C159985019 @default.
• W2753574154 hasConcept C17525397 @default.
• W2753574154 hasConcept C185592680 @default.
• W2753574154 hasConcept C191897082 @default.
• W2753574154 hasConcept C192562407 @default.
• W2753574154 hasConcept C204787440 @default.
• W2753574154 hasConcept C25197100 @default.
• W2753574154 hasConcept C2777289219 @default.
• W2753574154 hasConcept C2779227376 @default.
• W2753574154 hasConcept C2780965675 @default.
• W2753574154 hasConcept C2780997931 @default.
• W2753574154 hasConcept C49040817 @default.
• W2753574154 hasConcept C520434653 @default.
• W2753574154 hasConcept C71924100 @default.
• W2753574154 hasConceptScore W2753574154C111368507 @default.
• W2753574154 hasConceptScore W2753574154C111670793 @default.
• W2753574154 hasConceptScore W2753574154C120665830 @default.
• W2753574154 hasConceptScore W2753574154C121332964 @default.
• W2753574154 hasConceptScore W2753574154C127313418 @default.
• W2753574154 hasConceptScore W2753574154C136525101 @default.
• W2753574154 hasConceptScore W2753574154C142724271 @default.
• W2753574154 hasConceptScore W2753574154C147789679 @default.
• W2753574154 hasConceptScore W2753574154C159985019 @default.
• W2753574154 hasConceptScore W2753574154C17525397 @default.
• W2753574154 hasConceptScore W2753574154C185592680 @default.
• W2753574154 hasConceptScore W2753574154C191897082 @default.
• W2753574154 hasConceptScore W2753574154C192562407 @default.
• W2753574154 hasConceptScore W2753574154C204787440 @default.
• W2753574154 hasConceptScore W2753574154C25197100 @default.
• W2753574154 hasConceptScore W2753574154C2777289219 @default.
• W2753574154 hasConceptScore W2753574154C2779227376 @default.
• W2753574154 hasConceptScore W2753574154C2780965675 @default.
• W2753574154 hasConceptScore W2753574154C2780997931 @default.
• W2753574154 hasConceptScore W2753574154C49040817 @default.
• W2753574154 hasConceptScore W2753574154C520434653 @default.
• W2753574154 hasConceptScore W2753574154C71924100 @default.
• W2753574154 hasFunder F4320334764 @default.
• W2753574154 hasIssue "6" @default.
• W2753574154 hasLocation W27535741541 @default.

• next