FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2753929759> ?p ?o ?g. }

• W2753929759 endingPage "35" @default.
• W2753929759 startingPage "24" @default.
• W2753929759 abstract "This paper reports a microelectromechanical systems (MEMS) tactile sensor with a quad-seesaw-electrode (QSE) structure, which allows integration with a CMOS substrate. The QSE structure enables fully-differential detection and 3-axis force detection by utilizing the difference of the working mode of the four seesaw electrodes. In this study, we designed the sensor structure for upgrading of the 3-axis characteristics by improvement of the nonlinearities and miniaturization with sufficient sensitivities. Simulations by the finite element method (FEM) and capacitance calculations confirmed the 3-axis output characteristics, as well as the working principle. Then, a 3.0-mm-square sensor chip with the QSE structure was fabricated with a silicon-on-insulator (SOI) substrate and an anodically bondable low-temperature co-fired ceramics (LTCC) substrate as an alternative to the CMOS substrate. The measurement results successfully demonstrated the 3-axis fully-differential detections with principal-axis sensitivities over 20 fF/N, nonlinearities of almost 1% with 1 N full scale, and cross-axis sensitivities within 10%." @default.
• W2753929759 created "2017-09-15" @default.
• W2753929759 creator A5008972576 @default.
• W2753929759 creator A5012091351 @default.
• W2753929759 creator A5024253162 @default.
• W2753929759 creator A5024318495 @default.
• W2753929759 creator A5035083249 @default.
• W2753929759 creator A5037940534 @default.
• W2753929759 creator A5049362175 @default.
• W2753929759 creator A5079109888 @default.
• W2753929759 creator A5084127391 @default.
• W2753929759 date "2017-10-01" @default.
• W2753929759 modified "2023-10-02" @default.
• W2753929759 title "Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities" @default.
• W2753929759 cites W1964501408 @default.
• W2753929759 cites W1983156320 @default.
• W2753929759 cites W1997735341 @default.
• W2753929759 cites W2001381166 @default.
• W2753929759 cites W2023614418 @default.
• W2753929759 cites W2028044303 @default.
• W2753929759 cites W2035609997 @default.
• W2753929759 cites W2041437888 @default.
• W2753929759 cites W2054622944 @default.
• W2753929759 cites W2060622491 @default.
• W2753929759 cites W2110997148 @default.
• W2753929759 cites W2115239407 @default.
• W2753929759 cites W2132867546 @default.
• W2753929759 cites W2138329241 @default.
• W2753929759 cites W2171130677 @default.
• W2753929759 cites W2180368845 @default.
• W2753929759 cites W2292938372 @default.
• W2753929759 cites W2046149034 @default.
• W2753929759 doi "https://doi.org/10.1016/j.sna.2017.09.015" @default.
• W2753929759 hasPublicationYear "2017" @default.
• W2753929759 type Work @default.
• W2753929759 sameAs 2753929759 @default.
• W2753929759 citedByCount "10" @default.
• W2753929759 countsByYear W27539297592018 @default.
• W2753929759 countsByYear W27539297592019 @default.
• W2753929759 countsByYear W27539297592020 @default.
• W2753929759 countsByYear W27539297592021 @default.
• W2753929759 countsByYear W27539297592022 @default.
• W2753929759 crossrefType "journal-article" @default.
• W2753929759 hasAuthorship W2753929759A5008972576 @default.
• W2753929759 hasAuthorship W2753929759A5012091351 @default.
• W2753929759 hasAuthorship W2753929759A5024253162 @default.
• W2753929759 hasAuthorship W2753929759A5024318495 @default.
• W2753929759 hasAuthorship W2753929759A5035083249 @default.
• W2753929759 hasAuthorship W2753929759A5037940534 @default.
• W2753929759 hasAuthorship W2753929759A5049362175 @default.
• W2753929759 hasAuthorship W2753929759A5079109888 @default.
• W2753929759 hasAuthorship W2753929759A5084127391 @default.
• W2753929759 hasConcept C111368507 @default.
• W2753929759 hasConcept C121332964 @default.
• W2753929759 hasConcept C127313418 @default.
• W2753929759 hasConcept C154945302 @default.
• W2753929759 hasConcept C159762639 @default.
• W2753929759 hasConcept C171250308 @default.
• W2753929759 hasConcept C17525397 @default.
• W2753929759 hasConcept C185544564 @default.
• W2753929759 hasConcept C186453547 @default.
• W2753929759 hasConcept C192562407 @default.
• W2753929759 hasConcept C2777289219 @default.
• W2753929759 hasConcept C30066665 @default.
• W2753929759 hasConcept C37977207 @default.
• W2753929759 hasConcept C41008148 @default.
• W2753929759 hasConcept C46362747 @default.
• W2753929759 hasConcept C46722567 @default.
• W2753929759 hasConcept C49040817 @default.
• W2753929759 hasConcept C53143962 @default.
• W2753929759 hasConcept C544956773 @default.
• W2753929759 hasConcept C57528182 @default.
• W2753929759 hasConcept C62520636 @default.
• W2753929759 hasConcept C90509273 @default.
• W2753929759 hasConceptScore W2753929759C111368507 @default.
• W2753929759 hasConceptScore W2753929759C121332964 @default.
• W2753929759 hasConceptScore W2753929759C127313418 @default.
• W2753929759 hasConceptScore W2753929759C154945302 @default.
• W2753929759 hasConceptScore W2753929759C159762639 @default.
• W2753929759 hasConceptScore W2753929759C171250308 @default.
• W2753929759 hasConceptScore W2753929759C17525397 @default.
• W2753929759 hasConceptScore W2753929759C185544564 @default.
• W2753929759 hasConceptScore W2753929759C186453547 @default.
• W2753929759 hasConceptScore W2753929759C192562407 @default.
• W2753929759 hasConceptScore W2753929759C2777289219 @default.
• W2753929759 hasConceptScore W2753929759C30066665 @default.
• W2753929759 hasConceptScore W2753929759C37977207 @default.
• W2753929759 hasConceptScore W2753929759C41008148 @default.
• W2753929759 hasConceptScore W2753929759C46362747 @default.
• W2753929759 hasConceptScore W2753929759C46722567 @default.
• W2753929759 hasConceptScore W2753929759C49040817 @default.
• W2753929759 hasConceptScore W2753929759C53143962 @default.
• W2753929759 hasConceptScore W2753929759C544956773 @default.
• W2753929759 hasConceptScore W2753929759C57528182 @default.
• W2753929759 hasConceptScore W2753929759C62520636 @default.
• W2753929759 hasConceptScore W2753929759C90509273 @default.
• W2753929759 hasLocation W27539297591 @default.
• W2753929759 hasOpenAccess W2753929759 @default.

• next