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• W2754429168 endingPage "8703" @default.
• W2754429168 startingPage "8690" @default.
• W2754429168 abstract "In this work, we have quantitatively elucidated the source of the hydrogen content in the atomic layer deposition of Al2O3 at different temperatures (80–220 °C), by replacing the H2O precursor with heavy water (D2O) to use as a tracer and discern between the H coming from the unreacted metal precursor ligands and that from the unreacted −OD (hydroxyl) groups coming from the (heavy) water. The main source of impurities arises from the unreacted hydroxyl groups (−OD), reaching ∼18 atom % of deuterium at a deposition temperature of 80 °C. Reconsidering carefully our own and literature experimental data, we concluded that the generally accepted mechanism of steric hindering by monodentate Al(CH3)2 adsorbates (dimethylaluminum) cannot be solely responsible for the retention of hydroxyls during atomic layer deposition (ALD). On this regard, we propose two additional mechanisms that can lead to sterically hinder hydroxyl groups which will then remain unreacted in the film: surface rehydroxylation resulting in the reconfiguration of bidentate or tridentate adsorbates into monodentate adsorbates and hindered subsurface hydroxyl groups during the (heavy) water pulse and the hydroxylation of sterically hindered dissociated methyl chemisorbed species. Based on these three steric hindrance mechanisms, we constructed a growth model that consists of the initial chemisorption configurations of trimethyl-aluminum molecules with the alumina surface and the subsequent reconfiguration of the resulting adsorbates into a monodentate configuration that consequently leads to sterically hindered hydroxyl groups. The fraction of AlOx adsorbates arranged in monodentate and bidentate configurations entails a specific number of O/Al atoms and unreacted hydroxyl groups inside the film. This model was able to explain the deuterium content, the O/Al ratio, and the density obtained from Rutherford back-scattering and heavy ion elastic recoil detection analysis measurements. Furthermore, this model was able to predict more accurately the growth per cycle to what has been reported to be the ALD window of alumina. Our findings will spur further detailed investigations of the reaction and growth modes in ALD films." @default.
• W2754429168 created "2017-09-25" @default.
• W2754429168 creator A5005850897 @default.
• W2754429168 creator A5036782637 @default.
• W2754429168 creator A5051725744 @default.
• W2754429168 creator A5081623412 @default.
• W2754429168 date "2017-10-03" @default.
• W2754429168 modified "2023-10-10" @default.
• W2754429168 title "Reaction and Growth Mechanisms in Al₂O₃ deposited via Atomic Layer Deposition: Elucidating the Hydrogen Source" @default.
• W2754429168 cites W1602078015 @default.
• W2754429168 cites W1668040035 @default.
• W2754429168 cites W1905740964 @default.
• W2754429168 cites W1967780419 @default.
• W2754429168 cites W1969224115 @default.
• W2754429168 cites W1972256365 @default.
• W2754429168 cites W1974900665 @default.
• W2754429168 cites W1976353913 @default.
• W2754429168 cites W1977051047 @default.
• W2754429168 cites W1981577010 @default.
• W2754429168 cites W1995191254 @default.
• W2754429168 cites W1995836054 @default.
• W2754429168 cites W1996998209 @default.
• W2754429168 cites W1997458870 @default.
• W2754429168 cites W2000399637 @default.
• W2754429168 cites W2002938838 @default.
• W2754429168 cites W2015273186 @default.
• W2754429168 cites W2027742156 @default.
• W2754429168 cites W2058383826 @default.
• W2754429168 cites W2067952132 @default.
• W2754429168 cites W2079513030 @default.
• W2754429168 cites W2084679011 @default.
• W2754429168 cites W2087831582 @default.
• W2754429168 cites W2088981998 @default.
• W2754429168 cites W2093418857 @default.
• W2754429168 cites W2103209718 @default.
• W2754429168 cites W2110732177 @default.
• W2754429168 cites W2112839302 @default.
• W2754429168 cites W2126460252 @default.
• W2754429168 cites W2128659391 @default.
• W2754429168 cites W2151212164 @default.
• W2754429168 cites W2154273279 @default.
• W2754429168 cites W2164788318 @default.
• W2754429168 cites W2164875540 @default.
• W2754429168 cites W2282779075 @default.
• W2754429168 cites W2291239532 @default.
• W2754429168 cites W2294725650 @default.
• W2754429168 cites W2314349287 @default.
• W2754429168 cites W2325980707 @default.
• W2754429168 cites W2470357878 @default.
• W2754429168 cites W2527995625 @default.
• W2754429168 cites W2577417516 @default.
• W2754429168 cites W2581127827 @default.
• W2754429168 cites W2604015164 @default.
• W2754429168 cites W2645705076 @default.
• W2754429168 doi "https://doi.org/10.1021/acs.chemmater.7b02759" @default.
• W2754429168 hasPublicationYear "2017" @default.
• W2754429168 type Work @default.
• W2754429168 sameAs 2754429168 @default.
• W2754429168 citedByCount "83" @default.
• W2754429168 countsByYear W27544291682018 @default.
• W2754429168 countsByYear W27544291682019 @default.
• W2754429168 countsByYear W27544291682020 @default.
• W2754429168 countsByYear W27544291682021 @default.
• W2754429168 countsByYear W27544291682022 @default.
• W2754429168 countsByYear W27544291682023 @default.
• W2754429168 crossrefType "journal-article" @default.
• W2754429168 hasAuthorship W2754429168A5005850897 @default.
• W2754429168 hasAuthorship W2754429168A5036782637 @default.
• W2754429168 hasAuthorship W2754429168A5051725744 @default.
• W2754429168 hasAuthorship W2754429168A5081623412 @default.
• W2754429168 hasConcept C151730666 @default.
• W2754429168 hasConcept C161790260 @default.
• W2754429168 hasConcept C178516000 @default.
• W2754429168 hasConcept C178790620 @default.
• W2754429168 hasConcept C179104552 @default.
• W2754429168 hasConcept C185592680 @default.
• W2754429168 hasConcept C201194858 @default.
• W2754429168 hasConcept C2779227376 @default.
• W2754429168 hasConcept C2816523 @default.
• W2754429168 hasConcept C32909587 @default.
• W2754429168 hasConcept C33790079 @default.
• W2754429168 hasConcept C512968161 @default.
• W2754429168 hasConcept C544153396 @default.
• W2754429168 hasConcept C64297162 @default.
• W2754429168 hasConcept C69544855 @default.
• W2754429168 hasConcept C75473681 @default.
• W2754429168 hasConcept C86803240 @default.
• W2754429168 hasConceptScore W2754429168C151730666 @default.
• W2754429168 hasConceptScore W2754429168C161790260 @default.
• W2754429168 hasConceptScore W2754429168C178516000 @default.
• W2754429168 hasConceptScore W2754429168C178790620 @default.
• W2754429168 hasConceptScore W2754429168C179104552 @default.
• W2754429168 hasConceptScore W2754429168C185592680 @default.
• W2754429168 hasConceptScore W2754429168C201194858 @default.
• W2754429168 hasConceptScore W2754429168C2779227376 @default.
• W2754429168 hasConceptScore W2754429168C2816523 @default.
• W2754429168 hasConceptScore W2754429168C32909587 @default.
• W2754429168 hasConceptScore W2754429168C33790079 @default.

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